Browse > Article

Study on Measurement of Wafer Processing Throughput and Sequence Simulation of SWP(Single Wafer Process) Cleaning Equipment  

Sun, Bok-Keun (Dept. of Computer Engineering, Hoseo University)
Han, Kwang-Rok (Dept. of Computer Engineering, Hoseo University)
Publication Information
Journal of the Institute of Electronics Engineers of Korea CI / v.42, no.5, 2005 , pp. 31-40 More about this Journal
Abstract
In this study, we study measurement of wafer processing throughput and sequence simulation of single wafer type for wafer cleaning equipments that were used for etching, cleaning and polishing of wafer. Based on finite state machine, simulation model was built with identification of robot's status according to scheduling algorithm. Moreover, through performance of simulation as above, throughput per hour of cleaning equipment was measured. By the simulation method that are proposed in this paper, we could measure the wafer throughput per hour according to recipe and robot motion speed, and find optimal recipe and moving sequence of robot that maximize the throughput.
Keywords
시뮬레이션;처리량 측정;매엽식;웨이퍼 세정 장비;
Citations & Related Records
연도 인용수 순위
  • Reference
1 G. Shepherd, Scot Wingo, 'MFC Internals', Addison Wesley, pp. 178-190, 2004
2 E. Gamma, R. Helm, R. Johnson, J. Vlissides, 'Design Patterns', Addison Wesley, pp. 345-367, 2003
3 Lim, Low, Gan, Cai, 'Implementation Lessons of Performance Prediction Tool for Parrallel Conservative Simulation(Research Note)', LNCS, vol. 1900, pp. 189-201, 2001
4 박헌휘, 이춘수, 최승우, 함승주, '반도체 공정에서의 기상 세정장비 개발에 관한 연구' 한국산학기술학회 춘계학술대회 발표논문집, pp. 79-81, 2001
5 이치옹, '가스 용해기능수에 의한 반도체 웨이퍼 세정기술', 고압가스, pp. 292-296, 2004
6 전자자료사, '시뮬레이션 기반의 반도체 제조공정', 반도체, 1227-741X,(5), pp. 93-98, 2004
7 최장섭, 'Track 장비 산업의 발전과 동향', 73-81, 반도체산업, pp. 73-81, 2003
8 박영춘, '반도체 세정공정 및 장치기술 동향', 반도체산업, pp. 51-60, 2003
9 박영균, '테스트 핸들러의 기술적 동향' 한국반도체산업협회 기술동향 분석보고서, 2001
10 'http://msdn.microsoft.com/library' Microsoft
11 Peter Linz, 'An Introduction to Formal Languages and Automata', Heath, pp. 37-71, 2002
12 石井宏明,'モジュ-ル 構成に 依る 枚葉式 洗淨？置'クリ-ンテクノロジ-, vol. 11, no. 8, pp. 32-33, 2003
13 LU S. H, P.R. Kumar, 'Distributed scheduling based on due dates and buffer priorities', IEEE Transactions on Automatic Control, 36, 1406-1416, 1991   DOI   ScienceOn