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Influence of ITO-Electrode Deposition Method on the Electro-optical Characteristics of Blue LEDs  

Han, Jae-Ho (Samsung Electro-mechanics co., Ltd.)
Kim, Sang-Bae (Dept. of Electronic Engineering, Ajou University)
Jeon, Dong-Min (Samsung Electro-mechanics co., Ltd.)
Publication Information
Journal of the Institute of Electronics Engineers of Korea SD / v.44, no.11, 2007 , pp. 43-50 More about this Journal
Abstract
We have investigated the electro-optical characteristics and reliability of LEDs with the Indium-Tin-Oxide (ITO) electrodes formed by different deposition methods: electron beam evaporation, sputtering, and hybrid method of electron beam evaporation and subsequent sputtering. The deposition method of the ITO electrode has significant influence on the electro-optical characteristics and reliability of LEDs. The LEDs with the ITO electrodes formed by sputtering and electron beam evaporation have problems caused by sputtering damage and increased electrical resistance, respectively, and the problems have been solved by the hybrid method.
Keywords
Blue LED; GaN; ITO; E-beam evaporation; Sputtering;
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