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A Study on the Converter for MEMS Electrostatic Power Generator  

Kang Hee-Jong (Dept. of Electronic Engineering, Kookmin Univ.)
Publication Information
Journal of the Institute of Electronics Engineers of Korea SD / v.43, no.2, 2006 , pp. 1-7 More about this Journal
Abstract
This is a preliminary study on the MEMS(Miro Electro Mechanical System) electrostatic power generator. It suggested a converting device to change from the electrostatic to the dynamic electricity. To testify, it used Silvaco simulation tools(Athena and Atlas) and fabricated the converting device. The result of the simulation and test it seems to convert electrostatic into dynamic electricity effectively.
Keywords
MEMS; Electrostatic; Micro-power generator; Micro-scale generator; Electric Converter;
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