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A Study on the Evaluation of Piezoelectric Thin Film Characteristics in Composite Resonator Structure Using Resonance Spectrum Method  

Choi Joon Young (Dept. of Electronics Engineering, Inha University)
Chang Dong Hoon (Dept. of Electronics Engineering, Inha University)
Kang Seong Jun (Dept. of Semiconductor Materials & Devices Yosu National University)
Yoon Yung Sup (Dept. of Electronics Engineering, Inha University)
Publication Information
Journal of the Institute of Electronics Engineers of Korea SD / v.42, no.1, 2005 , pp. 9-17 More about this Journal
Abstract
We studied the characteristics of impedance and electromechanical coupling coefficient in ZnO and AIN thin films by using resonance frequency spectrum method. The response peak of impedance decreased with the decrease of thickness of piezoelectrics, the number of mode of response peak decreased with the decrease of substrate thickness. An error of Kt² estimated from input Kt² increased as the thickness of piezoelectrics decreased and the thickness of substrate increased. Also, the error was increased in case of a large acoustic impedance of substrate. It was found that the composite resonator operating in optimized condition could be designed through the resonance frequency spectrum analysis of composited resonator consisted of piezoelectric thin film and substrate.
Keywords
electromechanical coupling factor; piezoelectric; composite resonator; acoustic impedance;
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Times Cited By KSCI : 2  (Citation Analysis)
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