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An Analysis of the 1/f Noise Characteristics of Pocket Implanted MOSFETS  

이병헌 (충북대학교 전자공학과)
이기영 (충북대학교 전자공학과)
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Abstract
The anomalous behavior of the 1/f noise of halo or pocket ion implanted MOSFETs is investigated. The model for the anomalous 1/f noise behaviors of MOSFETs, which consist of inhomogeneous conductance along the channel is improved within a regional approximation as previous works and presented in a fen directly applicable to halo MOSFETs. The presented model reduces to the previous results, discussed in the linear region operation, for small drain bias. Comparisons with experimental results show that the 1/f model based on the regional approach can be applicable for limited ranges, especially for sufficiently large gate bias voltages.
Keywords
Pocket Implanted MOSFET; 1/f Noise; Regional Approximation;
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1 Y. Taur and T. H. Ning, Fund. of Modern VLSI Devices, Cambridge Univ. Press, 1998
2 R. Rios, W-K. Shih, A. Shah, S. Mudanai, P. Packan, T. Sandford, and K. Mistry, 'A Three-Transistor Threshold Voltage Model for Halo Processes,' in IEDM Tech. Dig., 2002, pp113-116   DOI
3 N. Miura, Y. Abe, K. Sugihara, T. Oishi, T. Furukawa, T. Nakahata, K. Shiozawa, S. Maruno, and, Y. Tokuda, 'Junction Capacitance Reduction Due to Self-Aligned Pocket Implantation in Elevated Source/Drain NMOSFETs,' IEEE Trans. Electron Devices, vol. 42, pp 1969-1973, 2001   DOI   ScienceOn
4 R. Gwoziecki, T. Skotnick, P. Bouillon, and P. Gentil, 'Optimization of Vth Roll-Off in MOSFET's with Advanced Channel Architecture-Retrograde Doping and Pockets,' IEEE Trans. Electron Devices, vol. 46, pp 1551-1561, 1999   DOI   ScienceOn
5 K. M. Cao, W. Liu, X. Jin, K. Green, J. Krick, T. Vrotsos, and C. Hu, 'Modeling of Pocket Implanted MOSFETs for Anomalous Analog Behavior,' in IEDM Tech. Dig., 1999, pp 171-174   DOI
6 B. Yu, C. H. J. Wann, E. D. Nowak, K. Noda, and C. Hu, 'Short-Channel Effect Improved by Lateral Channel-Engineering in Deep-Submicronmeter MOSFET's,' IEEE Trans. Electron Devices, vol. 44, pp 627-634, 1997   DOI   ScienceOn
7 Hoewoo Koo, Kieyoung Lee, Kyungho Lee, Tor A. Fjeldly, Michael S. Shur, 'Analysis of the Anomalous Drain Current Characteristics of Halo MOSFETs,' Solid State Electron., vol. 47, pp 99-106, 2003   DOI   ScienceOn
8 B. Boukriss, H. Haddara, S. Cristoloveanu, and A. Chovet, 'Modeling of the 1/f Noise Overshoot in Short-Channel MOSFET's Locally Degraded by Hot-Carrier Injection,' IEEE Electron Device Letters, vol. 10. pp 433-436, 1989   DOI   ScienceOn
9 Zeynep Celik-Butler and Petr Vasina, 'Channel Length Scaling of 1/f Noise in 0.18 ${\mu}m$ Technology MDD n-MOSFETs,' Solid State Electron., vol. 43, pp 1695- 1701, 1999   DOI   ScienceOn
10 Y. Okumura, M. Shirahata, A. Hachisuka, T. Okudaira, H. Aruma, and T. Matsukawa, 'Source-to-Drain Nonuniformly Doped Channel(NUDC) MOSFET Structure for High Current Drivability and Threshold Voltage Controll-ability,' IEEE Trans. Electron Devices, vol. 39, pp 2541-2552, 1992   DOI   ScienceOn
11 Ming-Horn Tsai and Tso-Ping Ma, 'The Impact of Device Scaling on the Current Fluctuation in MOSFETs,' IEEE Trans. Electron Devices, vol. 41, pp 2061- 2068, 1994   DOI   ScienceOn
12 H. S. Min, 'Unified Theory of Noise in Nondegenerate Semiconductors,' J. Appl. Phys., vol. 61,4549-4565, 1987   DOI
13 K. K. Hung, P. K. Ko, C. Hu, and Y. C. Cheng, 'A Unified Model for the Flicker Noise in Metal-Oxide-Semiconductor Field-Effect Transistors,' IEEE Trans. Electron Devices, Vol. 37, pp 654-665, 1990   DOI   ScienceOn
14 A. van der Ziel, 'Noise in Solid State Devices and Circuits,' John Wiely & Sons, 1986
15 H. Hwang, D. H. Lee, J. M. Hwang, 'Degradation of MOSFETs Drive Current Due to Halo Ion Implantation,' in IEDM Tech. Dig., 1999, pp 567-570   DOI