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Design and fabrication of SOI $1\times2$ Asymmetric Optical Switch by Thermo-optic Effect  

박종대 (명지대학교 전자공학과)
서동수 (명지대학교 전자공학과)
박재만 ((주)로템, 연구개발5팀)
Publication Information
Journal of the Institute of Electronics Engineers of Korea SD / v.41, no.10, 2004 , pp. 51-56 More about this Journal
Abstract
We propose and fabricate an 1${\times}$2 asymmetric optical switch by TOE using SOI wafer based on silicon which has very large TOE figure and it is a good material for optical devices. SOI wafer consists of 3 layers; upper Si layer for device(waveguide;core, n=3.5), buried oxide layer for insulator(clad, n=1.5) and Si substrate layer. We designed 1${\times}$2 asymmetric y-branched single mode optical waveguide switch by BPM simulation and metal heater by heat transfer simulation. Fabricated switch shows about 3.5 watts of power consumption and over 20dB of crosstalk between output channels.
Keywords
Optical switch; SOI; Optical communication; MEMS; Optical waveguide;
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