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Estimating the Thickness Errors in Vertical-Cavity Surface-Emitting Laser Structures from Optical Reflection spectra  

김남길 (아주대학교 전자공학부)
김상배 (아주대학교 전자공학부)
Publication Information
Journal of the Institute of Electronics Engineers of Korea SD / v.40, no.8, 2003 , pp. 572-579 More about this Journal
Abstract
By comparing the measured optical reflection spectra with calculated one by the transfer-matrix method (TMM) in epitaxial wafers for vertical-cavity surface-emitting lasers (VCSELs), we have estimated the systematic thickness errors in a simple and nondestructive way. The experimentally confirmed technique is based on the finding that the shape of the reflection spectra depends mainly on a newly defined single parameter, the effective error in the n-mirror layers, and the thickness error in the active cavity simply shifts the Fabry-Perot resonance wavelength. Also shown is that the proposed method is reliable when the relative standard deviation of the random thickness errors is less than 0.005. Because reflection spectra are routinely measured, we can easily estimate the thickness errors nondestructively with high spatial resolution.
Keywords
VCSEL; Semiconductor lasers; vapor deposition; reflectometry;
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Times Cited By KSCI : 1  (Citation Analysis)
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