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Fabrication and Characteristics of Parylene Coated Isolated Type Pressure Sensor  

김우정 (경북대학교 전자ㆍ전기공학부)
조용수 (경북대학교 전자ㆍ전기공학부)
김홍균 (경북대학교 전자ㆍ전기공학부)
최시영 (경북대학교 전자ㆍ전기공학부)
Publication Information
Journal of the Institute of Electronics Engineers of Korea SD / v.40, no.2, 2003 , pp. 81-86 More about this Journal
Abstract
To measure the pressure using semiconductor type pressure sensor in water or chemical solution, the sensor must be protected from the solution using proper packaging materials. stainless steel isolated type pressure sensor packaged with SUS316 can be widely used to measure the pressure in water or chemical due to its high corrosion-resistance and good performance in tensility and welding. Even if the surface of SUS316 has a plenty of nickel and chromium, the SUS316 is highly corrosive in acidic or alkaline solution. We coated parylene and adhesion promoting copper layer are 5${\mu}{\textrm}{m}$ and 200nm, respectively. The parylene coated stainless steel pressure sensor showed good anti-corosive characteristics in various strong acids. The accuracy of pressure sensor wasn't varied after parylene coating with 0.5%FSO.
Keywords
parylene coated stainless; isolated type pressure sensor;
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Times Cited By KSCI : 1  (Citation Analysis)
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