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Novel SAW-based pressure sensor on $41^{\circ}YX\;LiNbO_3$  

Wang, Wen (Div. of Electronics Engineering, Ajou University)
Lee, Kee-Keun (Div. of Electronics Engineering, Ajou University)
Hwang, Jung-Soo (Div. of Electronics Engineering, Ajou University)
Kim, Gen-Young (Div. of Electronics Engineering, Ajou University)
Yang, Sang-Sik (Div. of Electronics Engineering, Ajou University)
Publication Information
Journal of the Institute of Electronics Engineers of Korea TC / v.43, no.1, 2006 , pp. 33-40 More about this Journal
Abstract
This paper presents a novel surface acoustic wave (SAW)-based pressure sensor, which is composed of single phase unidirectional transducer (SPUDT), three reflectors, and a deep etched substrate for bonding underneath the diaphragm. Using the coupling of modes (COM) theory, the SAW device was simulated, and the optimized design parameters were extracted. Finite Element Methods (FEM) was utilized to calculate the bending and stress/strain distribution on the diaphragm under a given pressure. Using extracted optimal design parameters, a 440 MHz reflective delay line on 41o YX LiNbO3 was developed. High S/N ratio, shan reflection peaks, and small spurious peaks were observed. The measured S11 results showed a good agreement with simulated results obtained from coupling-of-modes (COM) modeling and Finite Element Method (FEM) analysis.
Keywords
Coupling of modes; Finite element method; Pressure sensor; SAW reflective delay line;
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