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A Parasitic Elements Extraction of MIM Capacitor Using Short-Open Calibration Method  

Kim, Yu-Seon (Dept. of Electronics Engineering, Chonnam Nat. University)
Nam, Hun (LG-Nortel)
Lim, Yeong-Seog (Dept. of Electronics Engineering, Chonnam Nat. University)
Publication Information
Journal of the Institute of Electronics Engineers of Korea TC / v.45, no.8, 2008 , pp. 114-120 More about this Journal
Abstract
In this paper, we extract the parasitic elements of the metal-insulate-metal(MIM) capacitor using short-open calibration (SOC). The scattering matrixes of short, open, and MIM structures in strip lines are measured by full electro-magnetic (EM) simulator and vector network analyser. The full EM simulations are performed by finite element method (FEM) that was fitted three dimensional structure analysis. The electro-magnetic effects of MIM capacitor laminated in the multi-layered structures are proposed the II equivalent circuit with lumped elements, and the relations between the measured scattering parameters of the MIM structures and lumped elements in the circuits are shown by performing 2 port network analysis. The extracted lumped elements using the proposed SOC method are independent to frequencies.
Keywords
Short-Open Calibration; microwave passive element; multi-layer; MIM capacitor;
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Times Cited By KSCI : 1  (Citation Analysis)
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