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Investigation on the Electromagnetic Characteristics of CMOS Rectangular Spiral Inductors according to the Geometrical Change  

Jin Kyoung-Shin (Dept. of Information Technology, Handong Global University)
Kim Young-Sik (Dept. of Information Technology, Handong Global University)
Publication Information
Journal of the Institute of Electronics Engineers of Korea TC / v.41, no.12, 2004 , pp. 125-130 More about this Journal
Abstract
The characteristics of on-chip spiral rectangular inductors in CMOS process are investigated through the simulation and experiment. The ADS-momentum is used for EM simulation, and the spiral inductors are fabricated with Hynix 0.35㎛ CMOS process. This research mainly concerned the effects of the geometric change in terms of the number of turns and the width of micro strip line. The measured and simulated results show that the Hynix 0.35㎛ process could support a top metal spiral inductor of 1nH to 6nH with Q-factor less than 5.
Keywords
Rectangular spiral inductor; EM simulation; Compact equivalent circuit model; Q-factor;
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