Browse > Article

Design of Silicon MEMS Package for CPW MMICs  

Kim, Jin-Yang (Department of Electronics Engineering, Ajou University)
Kim, Sung-Jin (Department of Electronics Engineering, Ajou University)
Lee, Hai-Young (Department of Electronics Engineering, Ajou University)
Publication Information
Journal of the Institute of Electronics Engineers of Korea TC / v.39, no.11, 2002 , pp. 40-46 More about this Journal
Abstract
A MEMS(Micro Electro Mechanical System) package using a doped-silicon(Si) carrier for coplanar microwave and millimeter-wave integrated circuits is proposed in order to reduce parasitic problems of leakage, coupling and resonance. The proposed carrier scheme is verified by fabrication and measuring a GaAs CPW(Coplanar Waveguide) on the three types of Si-carriers(gold-plated high resistivity, lightly doped, high resistivity). The proposed MEMS package using the lightly doped(15 ${\Omega}{\cdot}$) Si-carrier shows parasitic-free performance since the lossy Si-carrier effectively absorbs and suppresses the resonant leakage.
Keywords
MEMS; CPW; HRS; PPL; Resonance;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 G.-A. Lee, H.-Y. Lee, 'Suppression of the CPW Leakage in Common Millimeter Wave Flip-Chip Structures,' IEEE Microwave and Guided Wave Letters, vol. 8, No. 11, pp. 1-3, Nov. 1998   DOI   ScienceOn
2 HFSSTM(High Frequency Structure Simulator), ver 8.0, Ansoft
3 서재옥, 김진양, 이해영, '밀리미터파용 세라믹 패키지에서의 기생공진 해석 및 억제 방법,' 전자공학회논문지, 제 39권, TC편, 제 2호, pp. 43-49, 2002   과학기술학회마을
4 Qun Wu Bumman Kim, 'MENS Technology Moves Increasingly Toward Microwave Applications,' Microwave&RF pp. 97-104, July 2001
5 Thomas M. Weller, Linda P. B. Katehi, and Gabriel M. Rebeiz, 'High Performance Microshield Line Components, IEEE Trans. Microwave Theory and Techniques, vol. 43, No. 3, pp. 534-543, Mar. 1995   DOI   ScienceOn
6 Y. C. Shih, K. Kasel and L. Fong, 'A High Performance Quartz, Package For Millimeterwave Applications,' IEEE MTT-S Int. Symp. Dig., pp. 1063-1066, 1991   DOI
7 A. C. Reyes, S. M. El-Ghazaly, and S. Dorn, 'Silicon As A Microwave Substrate,' IEEE MTT-S Int. Symp. Dig., pp. 1759-1762 1994   DOI
8 권영수, 이해영, 박재영, 부종욱, '초고주파 집적회로를 위한 새로운 실리콘,' 한국전자파학회 종합학술발표회 논문집 Vol. 10, No. 1, pp. 104-108, 2000
9 B. Pillans, S. Eshelman, A. Malczewski, J. Ehmke, and C. Goldsmith, 'Ka-band RF MEMS Phase Shifters for Phased Array applications,' IEEE Radio Frequency Integrated Circuits(RFIC) Symposium, pp. 195-199, 2000   DOI
10 Herbert Reichl and Volker Grosser, 'Overview and Development Trends in the Field of MENS Packaging,' 14th IEEE International Conference on Micro Electro Mechanical Systems, pp. 1-5, 2001   DOI
11 W. H. Haydl, 'Resonance Phenomena and Power Loss in Conductor-backed Coplanar Structures,' IEEE Microwave and Guided Wave Letters, vol. 20, No. 12, pp. 514-516, Dec. 2000   DOI   ScienceOn
12 S.-J. Kim, H.-S. Yoon, and H.-Y. Lee, 'Suppression of Leakage Resonance in Coplanar MMIC Packages Using a Si Sub-Mount Layer,' IEEE Trans. Microwave Theory and Techniques, vol. 48, pp. 2664-2669, Dec. 2000   DOI   ScienceOn
13 Pierre Blondy, Andrew R. Brown, Dominique Cros, and Gabriel M. Rebeiz, 'Low-loss Micromachined Filters for Millimeter-wave Communication Systems,' IEEE Trans. Microwave Theory and Techniques, vol. 46, No. 12, pp. 2283-2288, Dec. 1998   DOI   ScienceOn
14 Y. Campos-Roca, L. Verweyen, M. Neumann, M. Fernandez-Barciela, M. C. Curras-Fancos, E. Sanchez-Sanchez, A. Hulsmann, M. Schlechtweg, 'Coplanar pHEMT MMIC Frequency Multipliers for 76 GHz Automotive Radar,' IEEE Microwave and Guided Wave Letters, vol. 9, No. 6, pp. 242-244, June. 1999   DOI   ScienceOn
15 Rashaunda M. Henderson, and Linda P. B. Katehi, 'Silicon-based Micromachined Packages for High-frequency Applications,' IEEE Trans. Microwve Theory and Techniques, vol. 47, No. 8, pp. 1563-1569, Aug. 1999   DOI   ScienceOn
16 C. C. Tien, C. C. Tzuang, S. T. Peung, C. C. Tien, C. C. Chang, J. W. Huang, 'Transmission Characteristics of Finite-width Conductor-backed Coplanar Waveguide,' IEEE Trans. Microwave Theory and Techniques, vol. 41, pp. 1616-1624, Sep. 1993   DOI   ScienceOn
17 T. Hirose, K. Makiyama, K. Ono, T. M. Shimura, S. Aoki, Y. Ohashi, Yokokawa, and Y. Watanabe, 'A Flip-chip MMIC Design with Coplanar Waveguide and Transmission Line in the W-band,' IEEE Trans. Microwave Theory and Techniques, vol. MTT-46, pp. 2276-2281, Dec. 1998   DOI   ScienceOn