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http://dx.doi.org/10.5370/KIEE.2014.63.10.1417

Analysis of DC Plasma using Electrostatic Probe and Fluid Simulation  

Son, Eui-Jeong (Dept. of Electrical and Computer Engineering, Pusan National University)
Kim, Dong-Hyun (Dept. of Electrical and Computer Engineering, Pusan National University)
Lee, Ho-Jun (Dept. of Electrical and Computer Engineering, Pusan National University)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.63, no.10, 2014 , pp. 1417-1422 More about this Journal
Abstract
Using a parallel plate DC plasma system was prepared. Using this equipment, we investigated the basic discharge characteristics of DC argon plasma in terms of electron density, temperature, voltage and current waveforms and plasma potential. The effects of the electrode gap distance, input voltage, ballast resistance and pressure were measured using electrostatic probe. Plasma simulation using fluid approximation has been performed. External circuit effects was included in the simulation. Measured and calculated current voltage characteristics show similar tendencies.
Keywords
DC plasma; Electrostatic probe; Fluid simulation;
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1 C. Corbella, E. Pascual, M.A. Gomez, M.C. Polo, J. Garcia-Cespedes, J.L. Andujar, E. Bertran "Characterization of diamond-like carbon thin films produced by pulsed-DC low pressure plasma monitored by a Langmuir probe in time-resolved mode" Diamond & Related Materials, 14, 3-7, 1062-1066 (2005)   DOI   ScienceOn
2 D.J. Ball, "Plasma Diagnostics and Energy Transport of a dc Discharge Used for Sputtering", J. Appl. Phys., 43, 7, 3047 (1972)   DOI
3 Michael A. Lieberman and Allan J. Lichtenberg, "principles of plasma discharges and materials processing", 547, (2005)
4 Alfred Grill, "Cold Plasma in Materials Fabrication : From Fundamentals to Applications", 157, (1994)
5 Yuri P. Raizer, "Gas Discharge Physics" 169-174, (1991)