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http://dx.doi.org/10.5370/KIEE.2011.60.9.1733

Improvement of Sense Mode Bandwidth of Vibratory Silicon-On-Glass Gyroscope Using Dual-Mass System  

Hwang, Yong-Suk (서울대 공대 전기공학부)
Kim, Yong-Kweon (서울대 공대 전기공학부)
Ji, Chang-Hyeon (이화여대 공대 컴퓨터.전자공학부)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.60, no.9, 2011 , pp. 1733-1740 More about this Journal
Abstract
In this research, a MEMS vibratory gyroscope with dual-mass system in the sensing mode has been proposed to increase the stability of the device using wide bandwidth. A wide flat region between the two resonance peaks of the dual-mass system removes the need for a frequency matching typically required for single mass vibratory gyroscopes. Bandwidth, mass ratio, spring constant, and frequency response of the dual-mass system have been analyzed with MATLAB and ANSYS simulation. Designed first and second peaks of sensing mode are 5,917 and 8,210Hz, respectively. Driving mode resonance frequency of 7,180Hz was located in the flat region between the two resonance peaks of the sensing mode. The device is fabricated with anodically bonded silicon-on-glass substrate. The chip size is 6mm x 6mm and the thickness of the silicon device layer is $50{\mu}m$. Despite the driving mode resonance frequency decrease of 2.8kHz and frequency shift of 176Hz from the sensing mode due to fabrication imperfections, measured driving frequency was located within the bandwidth of sensing part, which validates the utilized dual-mass concept. Measured bandwidth was 768Hz. Sensitivity calculated with measured displacement of driving and sensing parts was 22.4aF/deg/sec. Measured slope of the sensing point was 0.008dB/Hz.
Keywords
Dual-mass system; Gyroscope; Bandwidth; SiOG;
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