Browse > Article
http://dx.doi.org/10.5370/KIEE.2010.59.4.749

Characterizations of Surface Textured Silicon Substrated by XeF2 Etching System  

Kim, Seon-Hoon (한국광기술원 연구사업부)
Ki, Hyun-Chul (한국광기술원)
Kim, Doo-Gun (한국광기술원 광융합시스템센터)
Na, Yong-Beom ((주)한국유화 기업부설연구소)
Kim, Nam-Ho ((주)한국유화 기업부설연구소)
Kim, Hwe-Jong (한국광기술원)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.59, no.4, 2010 , pp. 749-753 More about this Journal
Abstract
We investigated the haze and the surface roughness of textured Si substrates etched by $XeF_2$ etching system with the etching parameters of $XeF_2$ pressure, etching time, and etching cycle. Here the haze was obtained as a function of wavelength from the measured reflectance. The haze of textured Si substrates was strongly affected by the etching parameter of etching cycle. The surface roughness of textured Si substrates was calculated with the haze and the scalar scattering theory at the wavelength of 800 nm. Then, the surface roughness was compared with that measured by atomic force microscope. The surce roughness obtained by two methods was changed with the similar tendency n terms of $XeF_2$ etching conditions.
Keywords
$XeF_2$ Texturing; Vapor Phase Etching Haze; Roughness;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
Times Cited By SCOPUS : 0
연도 인용수 순위
1 J. S. Yoo, S. K. Dhungel, and J. Yi, "A study on Silicon dry Etching for Solar Cell Fabrication Using Hollow Cathode Plasma System," Trans. KIEE., vol. 53C, No. 2, pp. 62-66, Feb. 2004.
2 P. Fath and G. Wileke, "Polycrystalline silicon water engineering for photovoltaic applications," Semicond. Sci. Technol., vol.9, pp. 101-104, 1994.   DOI   ScienceOn
3 S. Winderbaum, O. Reinhold, and F. Yun, "Reactive ion etching (RIE) as a method for texturing polycrystalline silicon solar cell," Sol. Energy Mater. Sol. Cell, vol. 46, No. 3, pp. 239-248, 1997.   DOI   ScienceOn
4 N. Senoussaoui, T. Repmann, T. Brammer, H. Stiebig, and H. Wagner, "Optical Properties of Microcrystallin, Thin Film Solar Cells", Rev. Energ. Ren., vol. 3, pp. 49-56, 2000.
5 J. S. Yoo, J. H. Lee, and J. Yi, "A Study on $MgF_2/CeO_2$ AR Coating of Mono-Crystalline Silicon Solar Cell," Trans. KIEE., vol. 52C, No. 10, pp. 447-450, Oct. 2003.
6 S. DeWolf, P. Choulat, E. Vazsonyi, R. Einhaus, E. Van Kerschaver, K. DE Clercq, and J. Szlufcik, "Towards industrial applications of isotropic texturing for multi-crystalline silicon cells," 16th EC PVSEC, pp. 1521-1524, 2000.
7 V. Y. Yerokhov, R. Hezel, M. Lipinski, R. Cioch, H. Nagel, A. Mylyanych, and P. Panek, "Cost-effective methods of texturing for silicon solar cell," Sol. Energy Mater. Sol. Cell, vol. 72, pp. 291-298, 2002.   DOI   ScienceOn
8 H. Saha, S.K. Datta, K. Mukhopadhyay, S. Banerjee, and M.K. Mukherjee, "Influence of surface texturization on the light trapping and spectral response of silicon solar cell," IEEE Trans. Elctron Devices, vol. 39, pp. 1100-1107, 1992.   DOI   ScienceOn
9 B. Gonzalez, R. Guerrero-Lemus, B. Diaz-Herrera, N. Marreo, J. Mendez-Ramos, and D. Borchert, "Optimization of roughness, reflection and photoluminescence for acid textured mc-Si solar cells etched at different $HF/HNO_3$ concentrations," Mat. Sci. Eng., vol. B159-160, pp. 295-298, 2009.
10 Z. Xi, D. Yang, W. Dan, C. Jun, X. Li, and D. Que, "Textrization of cast multicrystalline silicon for solar cell," Semicond. Sci. Technol., vol. 19, pp. 485 - 489, 2004.   DOI   ScienceOn
11 M. Python, E. Vallat-Sauvain, J. Bailat, D. Domine, L. Fesquet, A. Shah, and C. Ballif, "Relation between substrate surface morphology and microcrystalline", silicon solar cell performance," J. Non-Cryst. Solids, vol. 354, pp. 2258-2262, 2008.   DOI   ScienceOn
12 H. E. Bennett and J. O. Pocteus, "Relation Between Surface Reughness and Specular Reflectance at Normal Incidence," J. Opt. Soc. Am., vol. 51, pp. 123-129, 1961.   DOI
13 D.-H. Neuhaus and A. Manzer, "Industrial Silicon Water Solar Cell," Advanced in OptoElectrorics, ID 24521, 2007.