Characterizations of Surface Textured Silicon Substrated by XeF2 Etching System |
Kim, Seon-Hoon
(한국광기술원 연구사업부)
Ki, Hyun-Chul (한국광기술원) Kim, Doo-Gun (한국광기술원 광융합시스템센터) Na, Yong-Beom ((주)한국유화 기업부설연구소) Kim, Nam-Ho ((주)한국유화 기업부설연구소) Kim, Hwe-Jong (한국광기술원) |
1 | J. S. Yoo, S. K. Dhungel, and J. Yi, "A study on Silicon dry Etching for Solar Cell Fabrication Using Hollow Cathode Plasma System," Trans. KIEE., vol. 53C, No. 2, pp. 62-66, Feb. 2004. |
2 | P. Fath and G. Wileke, "Polycrystalline silicon water engineering for photovoltaic applications," Semicond. Sci. Technol., vol.9, pp. 101-104, 1994. DOI ScienceOn |
3 | S. Winderbaum, O. Reinhold, and F. Yun, "Reactive ion etching (RIE) as a method for texturing polycrystalline silicon solar cell," Sol. Energy Mater. Sol. Cell, vol. 46, No. 3, pp. 239-248, 1997. DOI ScienceOn |
4 | N. Senoussaoui, T. Repmann, T. Brammer, H. Stiebig, and H. Wagner, "Optical Properties of Microcrystallin, Thin Film Solar Cells", Rev. Energ. Ren., vol. 3, pp. 49-56, 2000. |
5 | J. S. Yoo, J. H. Lee, and J. Yi, "A Study on AR Coating of Mono-Crystalline Silicon Solar Cell," Trans. KIEE., vol. 52C, No. 10, pp. 447-450, Oct. 2003. |
6 | S. DeWolf, P. Choulat, E. Vazsonyi, R. Einhaus, E. Van Kerschaver, K. DE Clercq, and J. Szlufcik, "Towards industrial applications of isotropic texturing for multi-crystalline silicon cells," 16th EC PVSEC, pp. 1521-1524, 2000. |
7 | V. Y. Yerokhov, R. Hezel, M. Lipinski, R. Cioch, H. Nagel, A. Mylyanych, and P. Panek, "Cost-effective methods of texturing for silicon solar cell," Sol. Energy Mater. Sol. Cell, vol. 72, pp. 291-298, 2002. DOI ScienceOn |
8 | H. Saha, S.K. Datta, K. Mukhopadhyay, S. Banerjee, and M.K. Mukherjee, "Influence of surface texturization on the light trapping and spectral response of silicon solar cell," IEEE Trans. Elctron Devices, vol. 39, pp. 1100-1107, 1992. DOI ScienceOn |
9 | B. Gonzalez, R. Guerrero-Lemus, B. Diaz-Herrera, N. Marreo, J. Mendez-Ramos, and D. Borchert, "Optimization of roughness, reflection and photoluminescence for acid textured mc-Si solar cells etched at different concentrations," Mat. Sci. Eng., vol. B159-160, pp. 295-298, 2009. |
10 | Z. Xi, D. Yang, W. Dan, C. Jun, X. Li, and D. Que, "Textrization of cast multicrystalline silicon for solar cell," Semicond. Sci. Technol., vol. 19, pp. 485 - 489, 2004. DOI ScienceOn |
11 | M. Python, E. Vallat-Sauvain, J. Bailat, D. Domine, L. Fesquet, A. Shah, and C. Ballif, "Relation between substrate surface morphology and microcrystalline", silicon solar cell performance," J. Non-Cryst. Solids, vol. 354, pp. 2258-2262, 2008. DOI ScienceOn |
12 | H. E. Bennett and J. O. Pocteus, "Relation Between Surface Reughness and Specular Reflectance at Normal Incidence," J. Opt. Soc. Am., vol. 51, pp. 123-129, 1961. DOI |
13 | D.-H. Neuhaus and A. Manzer, "Industrial Silicon Water Solar Cell," Advanced in OptoElectrorics, ID 24521, 2007. |