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The Power Rating Design of Inductively Coupled Plasma Light Source and The Electrical Dependency Between Parameters  

Kim, Hyun-Il (동국대학 전기공학과)
Park, Dae-Hee (원광대학 전기전자및정보공학부)
Chang, Hong-Soon (한국산업기술대학 지식기반기술.에너지대학원)
Baek, Soo-Hyun (동국대학 전기공학과)
Yim, Youn-Chan (원광대학 전자재료공학과)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.57, no.3, 2008 , pp. 453-457 More about this Journal
Abstract
We studied on the dependency of parameters which those were used to design a ballast of ICP light source. These parameters were derived from Barkhausen criterion equation about the oscillating condition of ballast. Comparing with a change of turns, we can suggest that a change of l is suitable to control a $I_p$ of an ICP light source. According to the Z-l equation, we can find an optimum rating power of ICP light sources corresponding to l.
Keywords
Barkhausen criterion; Rating power; Inductively coupled plasma; Impedance; Design of ICP light source;
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