Piezoelectric Microspeakers Fabricated with High Quality AlN Thin Film |
Yi, Seung-Hwan
(충주대학교 공대 기계공학과/친환경 에너지 부품소재센터)
Jung, Kyung-Sick (충주대학교 공대 대학원 기계공학과) Kim, Dong-Kee (대진전자(주) 연구소) Shin, Gwang-Jae ((주)엠에스솔루션 연구소) |
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