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Fabrication of Nanoscale Metal Nanobeam Specimens and Evaluation of the Mechanical Properties of Gold Thin Film Nanostructures  

Baek, Chang-Wook (중앙대학교 전자전기공학부)
Hyeon, Ik-Jae (중앙대학교 전자전기공학부)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.56, no.7, 2007 , pp. 1294-1297 More about this Journal
Abstract
In this paper, fabrication techniques for nanoscale metallic nanobeam specimens have been proposed, and mechanical properties of the fabricated gold nanobeams have been evaluated by nanoindentation techniques and nanobeam bending test. Elastic modulus and hardness of gold nanobeams were measured to be $109.6\;{\pm}\;10\;GPa\;and\;1.73\;{\pm}\;0.3\;GPa$, respectively, from the nanoindentation test, while elastic modulus was $241\;{\pm}\;7\;GPa$ from the nanobeam bending test.
Keywords
NEMS; mechanical properties; freestanding specimens; nanoindentation; nanobeam bending method;
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