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A Study on the Sputtering System Using Ion Plating Technique  

Jeong, Yeon-Ho (한국전기연구원)
Choi, Young-Wook (한국전기연구원)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.56, no.12, 2007 , pp. 2179-2183 More about this Journal
Abstract
In this paper, to produce sheet plasma with high density for ion plating, we designed magnetic circuit of ion plating device consisting of solenoid coil and rectangular permanent magnet. And, we analyzed the effects of the magnetic field distribution using FEM (Finite Element Methode). Additionally, we made a sputtering system including ion plating technique on the basis of the design and verified the possibility of the sheet plasma application for advanced sputter system.
Keywords
Ion Plating; FEM; Sheet Plasma; Sputtering;
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