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The Fabrication of On-chip Spiral Inductors Through 3-D Field Analysis  

Lee, Han-Young (대림대학 전자정보통신계열)
Lee, Woo-Cheol (을지대 보건과학대 의료공학과)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.56, no.11, 2007 , pp. 1967-1971 More about this Journal
Abstract
In this paper, we verified basic forms and equivalent circuits of spiral inductors and various kinds of parasitics of equivalent circuits by using HFSS and Nexxim program that were 3-D EM analysis tools, and fabrication on-chip spiral inductors using Hynix's 0.25um 1-poly and 5-metal CMOS process. Comparing with PGS(patterned ground shield) and NPGS(non patterned ground shield) of spiral inductors of 3.5 turn, 4.5 turn and 5.5 turn, etc, the application of PGS could improve maximum Q value by 8-12%.
Keywords
PGS; Spiral Inductor; On-chip; Q-factor; CMOS;
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Times Cited By KSCI : 1  (Citation Analysis)
Times Cited By SCOPUS : 0
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