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The Development of Non-thermal Micro Plasma Source Under Atmospheric Pressure by Means of Submicrosecond Pulse Voltage Waveforms  

Choi, Joon-Young (부산대학 전기공학과)
Lee, Ho-Jun (부산대학 전기공학과)
Kim, Dong-Hyun (부산대학 PDP연구소)
Lee, Hae-June (부산대학 전기공학과)
Park, Chung-Hoo (부산대학 전기공학과)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.56, no.10, 2007 , pp. 1802-1806 More about this Journal
Abstract
Nowadays, many configurations and applications of small atmospheric plasma source have been investigated with growing interest, as it provides the bacteria inactivation, the surface modification and removal of unwanted small regions, and so on. In this paper, the non-thermal micro plasma source under atmospheric pressure by means of submicrosecond pulse voltage waveforms is suggested. Plasma operates in helium is appears as a small (sub-mm) glow at the tip of a plasma gun. Electrical measurements show that the plasma source operates at low voltage (about 500V) and the power consumption is about 1W at 25kHz. Moreover, the emission spectrum shows the relatively higher emission intensity of oxygen particles than those of helium and nitrogen.
Keywords
Micro Plasma; Atmospheric Pressure Plasma; APP; Submicrosecond Pulse; Plasma Source;
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