Browse > Article

Numerical Study on Optical Characteristics of Multi-Layer Thin Film Structures Considering Wave Interference Effects  

Shim, Hyung-Sub (중앙대학 기계학과)
Lee, Seong-Hyuk (중앙대학 기계학과)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.55, no.5, 2006 , pp. 272-277 More about this Journal
Abstract
The present study is devoted to investigate numerically the optical characteristics of multi-layer thin film structures such as $Si/SiO_2\;and\;Ge/Si/SiO_2$ by using the characteristics transmission matrix method. The reflectivity and the absorptivity rate for thin film structures are estimated for different incident angles of rays and various film thicknesses. In addition, the influence of wavelength on optical characteristics related to complex refractive index is examined. It is found that such wave-like characteristics are observed in predicting reflectivities and depends mainly on film thickness. Moreover, the present study predicts the film thickness for ignoring wave interference effects, and it also discusses the fundamental physics behind optical and energy absorption characteristics appearing in multi-layer thin film structures.
Keywords
Thin Film; Reflectivity; Absorption Rate; Film Thickness; Optical Characteristic; Wave Interference;
Citations & Related Records
연도 인용수 순위
  • Reference
1 A. V. Shah, H. Schade, M. Vanecek, J. Meier, E. Vallat-Sauvain, N. Wyrsch, U. Kroll, C. Droz, J. Bailat 'Thin-Film Silicon Solar Cell Technology', Progress in Photovoltaics, vol. 12, pp. 113-142, 2004   DOI   ScienceOn
2 C. P. Grigoropoulos, H. K. Park, and X. Xu, 'Modeling of Pulsed Laser Irradiation of Thin Silicon Layers', Int. J. Heat Mass Transfer, vol. 36, No.4, pp. 919-924, 1993   DOI   ScienceOn
3 J.L. Liu, K. L. Wang, C. D. Moore, M. S. Goorsky, T. Borca-Tasciuc, G. Chen, 'Experimental Study of a Surfactant-Assisted SiGe Graded Layer and a Symmetrically Strained Si/Ge Superlattice for Thermoelectric Applications', Thin Solid Films, vol. 369, pp, 121-125, 2000   DOI   ScienceOn
4 M. Q. Brewster, 'Thermal Radiative Transfer and Properties', John Wiley & Sons, USA, Chap. 4, 1992
5 D. Palik. Edward, 'Handbook of Optical Constants of Solids', Academic Press, pp, 465-478, pp. 545-569, and pp, 719-747, 1985
6 H. M. van Driel, 'Kinetics of High-Density Plasmas Generated in Si by 1.06- and 0.53 mm Picosecond Laser Pulses,' Phys, Rev. B., vol. 35, pp. 8166-8176, 1987   DOI   ScienceOn
7 M. Born and W. Wolf, Principles of Optics: 'Electromagnetic Theory of Propagation, Interference, and Diffraction of Light', 6th Edition, Cambridge University Press, Cambridge, UK, Chap. 1, 1980
8 D. Agassi, 'Phenomenological Model for Picosecond-Pulse Laser Annealing of Semiconductors', Journal of Applied Physics, vol. 55, pp, 4376-4383, 1984   DOI   ScienceOn