Polymeric Wavelength Filter Based on a Bragg Grating Using Nanoimprint Technique
![]() |
Ahn, Seh-Won
(LG전자기술원 소자재료연구소)
Lee, Ki-Dong (LG전자기술원 소자재료연구소) Kim, Do-Hwan (광운대학교 전자공학과) Chin, Won-Jun (광운대학교 전자공학과) Lee, Sang-Shin (광운대학교 전자공학과) |
1 | D. H. Kim, J. G .. Im, S. S. Lee, S. W. Ahn, and K. D. Lee, 'Polymeric Microring Resonator Using Nanoimprint Technique Based on a Stamp Incorporating a Smoothing buffer layer,' IEEE Photon. Technol. Lett., vol. 17, no. 11, pp. 2352-2354. 2005 DOI ScienceOn |
2 | M. D. Austin, H. Ge, W. Wu, M. Li, Z. Yu, D. Wasserman, S. A. Lyon,and S. Y. Chou, 'Fabrication of 5 nm linewidth and 14 nm pitch features by nanoirnprint lithography,' Appl. Phys. Lett., vol. 84, pp. 5299 - 5301, 2004 DOI ScienceOn |
3 | S. W. Ahn, K. D. Lee, J. S. Kim, S. H. Kim, S. H. Lee, J. D. Park, and P. W. Yoon, 'Fabrication of sub wavelength aluminum wire grating using nanoimprint lithography and reactive ion etching,' Microelecton. Eng., vol. 78 - 79, pp. 314 - 318, 2005 DOI ScienceOn |
4 | M. Colburn, A. Grot, M. Amistoso, B. J. Choi, T. Bailey, J. Ekerdt, S. V. Sreenivasan, J. Hollenhorst, and C. G. Willson, 'Step and flash imprint lithography for sub 100 nm patterning,' Proc. SPIE, vol. 3997, pp. 453 - 463, 2000 DOI |
5 | W. H. Wong and E. Y. B. Pun, 'Polymeric waveguide wavelength filters using electron beam direct writing,' Appl. Phys. Lett., vol. 79, pp. 3576-3578, 2001 DOI ScienceOn |
6 | S. Chou, P. R. Krauss, and P. J. Renstrom, 'Nanoimprint lithography,' J. Vac. Sci, Technol. B, vol. 14, no. 6, pp. 4129 - 4133, 1996 DOI ScienceOn |
7 | J. W. Kang, M. J. Kim, J. P. Kim, S. J. Yoo, J. S. Lee, D. Y. Kim, and J. J. Kim, 'Polymeric wavelength filters fabricated using holographic surface relief gratings on azobenzene containing polymer films,' Appl, Phys, Lett., vol. 82, pp, 3823- 3825, 2003 DOI ScienceOn |
8 | L. Eldada, R. Blomquist, M. Maxfield, D. Pant, G. Boudoughian, C. Poga, and R. A. Norwood, 'Thermooptic planar polymer Bragg grating OADM's with broad tuning range,' IEEE Photon. Technol. Lett., vol. 11, pp. 448-450, 1999 DOI ScienceOn |
9 | M. C. Oh, H. J. Lee, M. H. Lee, J. H. Ahn, S. G. Han, and H. G.Kim, 'Tunablewavelength filters with Bragg gratings in polymerwaveguides,' Appl. Phys. Lett., vol. 73, pp. 2543 - 2545, 1998 DOI ScienceOn |
10 | M. C. Oh, H. J. Lee, M. H. Lee, J. H. Ahn, S. G. Han, and H. G. Kim, 'Tunable wavelength filters with Bragg gratings in polymer waveguides,' Appl. Phys. Lett., vol. 73, pp, 2543-2545, 1998 DOI ScienceOn |
![]() |