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Two-dimensional Analytic Solution of the Magnetic Field for the Ferrites of DC Magnetron Sputtering Device  

Yu Dong-Hun (충북대학 전기공학과)
Kwon Deuk-Chul (충북대학 전기공학과)
Lee Jong-Kyu (충북대학 전기공학과)
Yoon Nam-Sik (충북대학 전기전자컴퓨터공학부)
Kim Jung-Hyung (한국표준과학연구원)
Shin Yong-Hyeon (한국표준과학연구원)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.54, no.7, 2005 , pp. 326-331 More about this Journal
Abstract
We obtain analytical expressions the magnetic field of ferrites for DC magnetron sputtering device, which has been widely used for vacuum thin film deposition, and suggested the equation on maximum radius of the magnetic field by analytic solution. Also, the analytic results are compared with some calculations using magnetization elements of right-angled hexahedron.
Keywords
DC Magnetron Sputtering; Analytic Solution; Numerical Solution; Magnetic Field; Ferrite;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
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