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Establishment of Equivalent Circuit Model about Planar-type Inductively Coupled Plasma Sources  

Lee Jong-Kyu (충북대학 전기공학과)
Kwon Deuk-Chul (충북대학 전기공학과)
Yu Dong-Hun (충북대학 전기공학과)
Yoon Nam-Sik (충북대학 전기전자컴퓨터공학부)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.54, no.5, 2005 , pp. 218-223 More about this Journal
Abstract
Impedance matching characteristics of planar type inductively coupled plasma sources are investigated utilizing the previously reported two-dimensional theory[1] of the anomalous skin effect. Two types of matching networks are considered, and the values of the circuit elements are expressed as functions of various reactor parameter. Also, two cases of perfect and imperfect matching conditions are considered and the functional dependence of the values of matching capacitance and reflection coefficient on the various reactor parameters are investigated using the present circuit model.
Keywords
Plasma; Network;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
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