Browse > Article

Structural and Electrical Properties of Vanadium Oxide Thin Films Annealed in Vacuum  

Choi Bok-Gil (공주대 공대 정보통신공학부)
Choi Chang-Kyu (서울산업대 전기공학과)
Kwon Kwang-Ho (한서대 공대 전자공학과)
Kim Sung-Jin (경남대 공대 전자전기공학부)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.54, no.1, 2005 , pp. 1-7 More about this Journal
Abstract
Thin films of vanadium oxide(VO/sub x/) were deposited by r.f. magnetron sputtering from V₂O/sub 5/ target with oxygen/(oxygen+argon) partial pressure ratio of 0% and 8% and in situ annealed in vacuum at 400℃ for 1h and 4h. Crystal structure, chemical composition, molecular structure, optical and electrical properties of films were characterized through XRD, XPS, RBS, FTIR, optical absorption and electrical conductivity measurements. The films as-deposited are amorphous, but 0%O₂ films annealed for time longer than 4h and 8% O₂ films annealed for time longer than 1h are polycrystalline. As the oxygen partial pressure is increased the films become more stoichiometric V₂O/sub 5/. When annealed at 400℃, the as-deposited films are reduced to a lower oxide. The optical transmission of the films annealed in vacuum decreases considerably than the as-deposited films and the optical absorption of all the films increases rapidly at wavelength shorter than about 550nm. Electrical conductivity and thermal activation energy are increased with increasing the annealing time and with decreasing the oxygen partial pressure.
Keywords
Vanadium Oxide; Thin Films; Sputtering; Vacuum Annealing; Sensor;
Citations & Related Records
연도 인용수 순위
  • Reference
1 C. M. Osburn and E. J. Weitzman, 'Electrical conduction and dielectric breakdown in silicon dioxide films on silicon', J. Electrochem. Soc., vol. 119, no. 5, pp. 603-609, 1972   DOI
2 C. V. Ramana and O. M. Hussain, 'Optical absorption behaviour of vanadium pentoxide thin films', Adv. Mater. Opt. Electron., vol. 7, pp. 225-231, 1997   DOI   ScienceOn
3 C. R. Aita, Y. L. Liu, M. L. Kao, and S. D. Hansen, 'Optical behavior of sputter-deposited vanadium pentoxide', J. Appl. Phys., vol. 60, no. 2, pp. 749-753, 1986   DOI
4 S. Krishnakumar and C. S. Menon, 'Optical and electrical properties of vanadium pentoxide thin films', Phys, Stat. Sol., vol. A153, pp. 439-444, 1996   DOI
5 G. A. Sawatzky and D. Post, 'X -ray photoelectron and Auger spectroscopy study of some vanadium oxides', Phys. Rev. B, vol. 20, pp. 1546-1555, 1979   DOI
6 G. A. Khan and C. A. Hogarth, 'Infrared absorption spectra of evaporated $V_2O_5$ and co-evaporated $V_2O_5/B_2O_3$ thin films', J. Mater. Sci., vol. 26, pp. 799-803, 1991   DOI
7 R. Ramirez, B. Casal, L. Utrera, and E. Ruiz.-Hitzky, 'Oxygen reactivity in vanadium pentoxide: electronic structure and infrared spectroscopy studies', J. Phys. Chem., vol. 94, no. 26, pp. 8960-8965, 1990   DOI
8 S. D. Hansen and C. R. Aita, 'Low temperature reactive sputter deposition of vanadium oxide', J. Vac. Sci. Technol., vol. A3, pp. 660-663, 1985   DOI
9 V. S. Pankajakshan and K. Neelakandan, 'Electrical conductivity of vacuum-deposited vanadium pent-oxide thin films', Thin Solid Films, vol. 215, pp. 196-199, 1992   DOI   ScienceOn
10 N. Ozer, S. Sabuncu, and J. Cronin, 'Electrochromic properties of sol-gel deposited Ti-doped vanadium oxide film'. Thin Solid Films, vol. 338, pp. 201-206, 1999   DOI   ScienceOn
11 R. Hornsey, P. Thomas, A. Savchenko, and T. Pope, 'Nonoptical characterization techniques for uncooled microbolometer infrared sensors', IEEE Trans. Electron Devices, vol. 47, no. 12, pp. 2294-2300, 2000   DOI   ScienceOn
12 G. A. Nyberg and R. A. Buhrman, 'Preparation and optical properties of reactively evaporated $VO_2$ thin films', J. Vac. Sci. Technol., vol. A2, pp. 301-302, 1984
13 R. T. R. Kumar, B. Karunagaran, D. Mangalaraj, S. K. Narayandass, P. Manoravi, M. Joseph, and V. Gopal, 'Pulsed laser deposited vanadium oxide thin films for uncooled infrared detectors', Sensors and Actuators, vol. A107, pp. 62-67, 2003   DOI   ScienceOn
14 A. Z. Moshfegh and A. Ignatiev, 'Formation and characterization of thin film vanadium oxides', Thin Solid Films, Vol. 198, pp. 251-268, 1991   DOI   ScienceOn
15 L. Dong, R. Yue, and L. Liu, 'An uncooled microbolometer infrared detector based on poly-SiGe thermistor', Sensors and Actuators, vol. A105, pp. 286-292, 2003   DOI   ScienceOn
16 A. M. Abo El Soud, B. Mansour, and L. I. Soliman, 'Optical and electrical properties of $V_2O_5$ thin films', Thin Solid Films, vol. 247, pp. 140-143, 1994   DOI   ScienceOn
17 D. S. Tezcan, S. Eminoglu, and T. Akin, 'A low-cost uncooled infrared micro bolometer detector in standard CMOS technology', IEEE Trans. Electron Devices, vol. 50, no. 2, pp. 494-501, 2003   DOI   ScienceOn