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Comparison of Models and Numerical Analysis Methods in Fluid Simulation of High Density Inductively Coupled Plasma Sources  

권득철 (충북대학 전기공학과)
윤남식 (충북대학 전기전자컴퓨터공학)
김정형 (한국표준과학연구)
신용현 (한국표준과학연구원)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.53, no.8, 2004 , pp. 433-442 More about this Journal
Abstract
Various models and various boundary conditions have been suggested for fluid transport simulations of high density plasma discharges such as the inductively coupled plasma discharge. In this work, we compare the various models using one-dimensional simulations based on the FDM(finite difference method), the upwind scheme, the power-law scheme, and the dielectric relaxation scheme［l］ Comparing the exactness, the numerical stability and the efficiency of the various models. the most adoptable model is suggested.
Keywords
Plasma; Simulation;
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