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Fabrication and Characteristics of Thermopneumatic-Actuated Polydimethylsiloxane Micropump  

김진호 (명지대 전기공학과)
문민철 (명지대 전기공학과)
김주호 (명지대 전기공학과)
김영호 (수원대 전자재료공학과)
김한수 (두원공과대학 전기과)
한경희 (명지대 전기공학과)
김용상 (명지대 전기공학과)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.53, no.6, 2004 , pp. 342-346 More about this Journal
Abstract
A thermopneumatic-actuated polydimethylsiloxane (PDMS) micropump has been fabricated and their properties are characterized. The diffusers are used as a flow-rectifying element instead of passive check valves. The advantages of the proposed microvalve are of the low cost fabrication process and the transparent optical property using PDMS and indium tin oxide (ITO) glass. We presented the PDMS micropump that is easily integrated with the in-channel PDMS microvalves on the same substrate. The flowrate of the micropump increases linearly as the applied pulse voltage to the ITO heater increases. The fabricated ITO heater resistance is 6.54k$\Omega$. The peak of the flow rate is observed at the duty ratio of 10% for the applied pulse voltage of 55V at 6Hz and the maximum flow rate of 78nl/min is measured.
Keywords
micropump; thermopneumatic- actuation; PDMS; ITOheater; diffuser;
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