A Study on Low Temperature Sequential Lateral Solidification(SLS) Poly-Si Thin Film Transistors(TFT′s) with Molybdenum Gate
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고영운
(삼성전자 DS총괄 AMLCD 사업부)
박정호 (고려대학 공과학과 전기공학과) 김동환 (고려대학 공과학과 재료공학부) 박원규 (LGPhilips-LCD 연구소) |
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Low-temperature singlecrystal Si TFTs fabricated on Si films processed via sequential lateral solidification
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