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Analysis of Initial Stage of Copper Electrodeposition for Fine Pattern  

조차제 (LG 전선연구소)
최창희 (LG 전선연구소)
김상겸 (LG 전선연구소)
박대희 (원광대 전기전자 및 정보공학부)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.52, no.4, 2003 , pp. 164-168 More about this Journal
Abstract
The initial stage of copper electrodeposition has been known to be very important role for morphology and physical properties after final growth. The factors affecting the nucleation are electrode, current density, electrolyte and temperature. Current studies has illuminated the initial nucleation of copper electrodeposition in the viewpoint of the surface status of electrode and analyzed using EIS and SEM observation
Keywords
Nucleation; Electrodeposition; EIS; Surface oxidation; Fume;
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