Microstructural Characterization of MOCVD RuOx Thin Films and Effects of Annealing Gas Ambient |
Kim, Gyeong-Won
(Dept. of Electrical Elecronic Computer Engineering, Chungbuk National University)
Kim, Nam-Su (Dept. of Electrical Elecronic Computer Engineering, Chungbuk National University) Choe, Il-Sang (Hynix Semiconductor) Kim, Ho-Jeong (Hynix Semiconductor) Park, Ju-Cheol (Hynix Semiconductor) |
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