1 |
B. Elliason, M. Hirth, and U. Kogelschatz,'Ozone synthesis from oxygen in dielectric barrier discharges', J. Phys. D: Appl. Phys., Vol. 20, pp. 1421-1437, 1987
DOI
ScienceOn
|
2 |
B. Elliason and U. Kogelschatz,'UV excimer radiation from dielectric-barrierdischarge', Appl. Phys., B. Vol. 46, pp. 299-303, 1988
DOI
|
3 |
A. K. Laflamme,'Double discharge excitation for atmospheric pressure CO2 lasers' Rev. Sci. Inst., Vol. 41(11), pp. 1578-1580, 1970
DOI
|
4 |
J. S. Logan, J. H. Keller, and R. G. Simmons, 'The rf glow-discharge sputtering model',J. Vac. Sci. Technol., Vol. 14(1), pp. 92-97. 1977
DOI
|
5 |
D. B. IIic, 'Impedance measurement as a diagnostic for plasma reactors', Rev. Sci.Instrum., Vol. 52(10), pp. 1542-1545, 1981
DOI
ScienceOn
|
6 |
K. J. Clay, S. P. Speakman, G. A. J. Amaratunga, and S. R. P. Silva, 'Characterization of a-C:H:N deposition from CH4/N2 rf plasmas using optical emission spectroscopy', J. Appl. Phys., Vol. 79(9), pp. 7227-7233, 1996
DOI
|
7 |
이봉주, 히데오미 코이누마, '산화물 산화주석( )박막의 식각 메커니즘', 새물리, 제43권, 제6호, pp. 330-334, 2001
과학기술학회마을
|
8 |
A. D. MacDonald and S. C. Brown, 'High Frequency Gas Discharge Breakdown in Helium', Phys. Rev., Vol. 75(3), pp. 411-418, 1949
DOI
|