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http://dx.doi.org/10.3795/KSME-B.2015.39.2.119

Numerical Study on the Pulse Heating Type Infinitesimal Liquid Mass Flow Meter  

Kim, Taig Young (Dept. of Mechanical Engineering, Korea Polytechnic Univ.)
Publication Information
Transactions of the Korean Society of Mechanical Engineers B / v.39, no.2, 2015 , pp. 119-124 More about this Journal
Abstract
Numerical study on the new design of the liquid mass flow meter in infinitesimal flow rate for semiconductor production is performed. The heater and thermistor are wired on the circular tube about 0.3mm inner diameter with designed gap between them. After the time interval from the single pulse heating the thermistor reaches its peak temperature and this time interval is almost inversely proportional to the liquid mass flow rate. The axial conduction in tube wall and convection through the flow is combined. As a result, the peak temperature moving velocity is much smaller than flow mean velocity and there is no linear relationship between them. In this study, the effects of design parameters such as the tube inner/outer diameter, wired heater width, and the gap between heater and thermistor are investigated and the trends of optimization in these parameters are discussed.
Keywords
Liquid Mass Flow Meter; Pulse Heating Type; Circular Tube Convective Heat Transfer;
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