Experimental Study on the Control Characteristics of Each Channel in a Semiconductor Chiller |
Kim, Hyeon-Joong
(Dept. of Mechanical Engineering, Korea Univ.)
Kwon, Oh-Kyung (Energy System R&D Group, Korea Institute of Industrial Technology) Cha, Dong-An (Energy System R&D Group, Korea Institute of Industrial Technology) Kim, Yong-Chan (Dept. of Mechanical Engineering, Korea Univ.) |
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6 | Cha, D. A., Kwon, O. K. and Oh, M. D., 2010, "An Experimental Study on Process Chiller for Semiconductor Temperature Control," Trans. of the KSME (B) Vol. 35, No. 5, pp. 459-465. 과학기술학회마을 DOI ScienceOn |