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Laser, D. J., Yao, S., Chen C. H., Mikkelsen, J. .,Goodsen, K.. E., Santiago J. G., and Kenny, T. W.,2001, “A Low Voltage Silicon MicromachinedParallel-Plate Electrokinetic Pump,” in Proc. 11th Int.Conference. Solid-State Sensors and Actuators(Transducers’01), Munich,Germany
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