Browse > Article
http://dx.doi.org/10.3795/KSME-B.2006.30.2.153

Surface Temperature Measurement in Microscale with Temperature Sensitive Fluorescence  

Jung Woonseop (서울대학교 기계항공공학부)
Kim Sungwook (삼성종합기술원)
Kim Ho-Young (서울대학교 기계항공공학부)
Yoo Jung Yul (서울대학교 기계항공공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers B / v.30, no.2, 2006 , pp. 153-160 More about this Journal
Abstract
A technique for measuring surface temperature field in micro scale is newly proposed, which uses temperature-sensitive fluorescent (TSF) dye coated on the surface and is easily implemented with a fluorescence microscope and a CCD camera. The TSF dye is chosen among mixtures of various chemical compositions including rhodamine B as the fluorescent dye to be most sensitive to temperature change. In order to examine the effectiveness of this temperature measurement technique, numerical analysis and experiment on transient conduction heat transfer for two different substrate materials, i. e., silicon and glass, are performed. In the experiment, to accurately measure the temperature with high resolution temperature calibration curves were obtained with very fine spatial units. The experimental results agree qualitatively well with the numerical data in the silicon and glass substrate cases so that the present temperature measurement method proves to be quite reliable. In addition, it is noteworthy that the glass substrate is more appropriate to be used as thermally-insulating locally-heating heater in micro thermal devices. This fact is identified in the temperature measuring experiment on the locally-heating heaters made on the wafer of silicon and glass substrates. Accordingly, this technique is capable of accurate and non-intrusive high-resolution measurement of temperature field in microscale.
Keywords
Temperature Sensitive Fluorescence; Micro Heater; Local Heating; Temperature Field;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Sakakibara, J., Hishida, K. and Maeda, M., 1993,'Measurements of Thermally Stratified Pipe Flow Using Image-Processing Techniques,' Experiments in Fluids, Vol. 16, pp. 82-96   DOI
2 Yoon, D. S., Lee, Y. S., Lee, Y., Cho, H. J., Sung, S. W., Oh, K. W., Cha, J. and Lim, G, 2002, 'Precise Temperature Control and Rapid Thermal Cycling in a Micromachined DNA Polymerase Chain Reaction Chip,' Journal of Micromechanics and Microengineering, Vol. 12, pp. 813-823   DOI   ScienceOn
3 Chaudhari, A. M., Woudenberg, T. M., Albin, M. and Goodson, K. E., 1998, 'Transient Liquid Crystal Thermometry of Microfabricated PCR Vessel Arrays,' Journal of Micro electromechanical Systems, Vol. 7, No. 4, pp. 345-355   DOI   ScienceOn
4 Liu, J., Enzelberger, M. and Quake, S., 2002, 'A Nanoliter Rotary Device for Polymerase Chain Reaction,' Electrophoresis, Vol. 23, pp. 1531-1536   DOI   ScienceOn
5 Sammarco, T. S. and Bums, M. A., 1999, 'Thermocapillary Pumping of Discrete Drops in Microfabricated Analysis Devices,' AIChE J., Vol. 45, No.2, pp. 350-366   DOI   ScienceOn
6 Kim, H. J. and Kihm, K. D., 2001, 'Application of a Two-Color Laser Induced Fluorescence (LIF) Technique for Temperature Mapping,' Proc. 2001 ASME International Mechanical Engineering Congress and Exposition, IMECE2001/HTD-24411 , New York, NY, USA
7 Coppeta, J. and Rogers, C., 1998, 'Dual Emission Laser Induced Fluorescence for Direct Planar Scalar Behavior Measurements,' Experiments in Fluids, Vol. 25, pp. 1-15   DOI
8 Clemens, N. T., 2002, 'Flow Imaging,' Encyclopedia of Imaging Science and Technology (ed. by Hornak, J. P.), John Wiley & Sons, New York, NY, USA, pp. 390-419
9 Hishida, K. and Sakakibara, J., 2000, 'Combined Planar Laser-Induced Fluorescence-Particle Image Velocimetry Technique for Velocity and Temperature Fields,' Experiments in Fluids, Vol. 29, Issue 7, pp. S129-S140   DOI
10 Funatani, S., Fujisawa, N. and Ikeda, H., 2004, 'Simultaneous Measurement of Temperature and Velocity Using Two-Colour LIF Combined with PIV with a Colour CCD Camera and its Application to the Turbulent Buoyant Plume,' Measurement Science and Technology, Vol. 15, pp. 983-990   DOI   ScienceOn
11 Ross, D., Gaitan, M. and Locascio, L. E., 2001, 'Temperature Measurement in Microfluidic Systems Using a Temperature-Dependent Fluorescent Dye,' Analytical Chemistry, Vol. 73, pp. 4117-4123   DOI   ScienceOn
12 Coolen, M. C. J., Kieft, R. N., Rindt, C. C. M. and van Steenhoven, A. A., 1999, 'Application of 2-D LIF Temperature Measurements in Water using a Nd:YAG Laser,' Experiments in Fluids, Vol. 27, pp. 420-426   DOI
13 Crimaldi, J. P., 1997, 'The Effect of Photo bleaching and Velocity Fluctuations on Single-Point LIF Measurements,' Experiments in Fluids, Vol. 23, pp. 325-330   DOI
14 Sakakibara, J., Hishida, K. and Maeda, M., 1997, 'Vortex Structure and Heat Transfer in the Stagnation Region of an Impinging Plane Jet (Simultaneous Measurements of Velocity and Temperature Fields by Digital Particle Image Velocimetry and Laser-Induced Fluorescence),' International Journal of Heat and Mass Transfer, Vol. 40, No. 13, pp. 3163-3176   DOI   ScienceOn
15 Sakakibara, J. and Adrian, R. J., 1999, 'Whole Field Measurement of Temperature in Water Using Two-Color Laser Induced Fluorescence,' Experiments in Fluids, Vol. 26, pp. 7-15   DOI
16 Azar, K., Benson, J. R. and Manno, V. P., 1991, 'Liquid Crystal Imaging for Temperature Measurement of Electronic Devices,' Proc. 7th Annual IEEE Semiconductor Thermal Measurement and Management Symposium, Phoenix, AZ, USA, pp. 23-33   DOI