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http://dx.doi.org/10.3795/KSME-A.2011.35.5.495

Experimental Study on Electrical Discharge in Nanoscale Gaps  

Lee, Young-Min (Dept. of Applied Computer Mold design, Korea Poly-tech VI)
Choi, Hae-Woon (Mechanical and Automotive Engineering, Keimyung Univ.,)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.35, no.5, 2011 , pp. 495-501 More about this Journal
Abstract
We present an experimental study of electrical discharge in nanoscale gaps. The discharge occurred between a cathode made of sharpened Pt-Ir wire and a gold-plated anode. Electric discharges were detected for electric potentials from 10 V to 80 V, and their gaps ranged from 50 nm to 800 nm. The spark signals indirectly showed spark phenomena such as discharges or shortages in the system. The sparks and discharges strongly depended on the electric potential (voltage) and the radius of the tips. For small gaps, the electrical discharge was random and strongly depended on the radius of the cathode tips.
Keywords
Nanogap; Electrical Discharge; Micromachining;
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