Development of Bonded Wafer Analysis System |
Jang, Dong-Young
(서울산업대학교 산업정보시스템공학과)
Ban, Chang-Woo (서울산업대학교 에너지환경대학원 NIT공학과) Lim, Young-Hwan (서울테크노파크) Hong, Suk-Ki (서울산업대학교 IT정책전문대학원 산업정보시스템공학과) |
1 | Zhao, J. and Martin A. Green, 1991, 'Optimized Anti-reflection Coatings for High-Efficiency Silicon Cells,' IEEE Transactions on Electron Devices, Vol. 38, No. 8 DOI ScienceOn |
2 | An, I. S., 2000, Ellipsometry, Hanyang University |
3 | Pang, H. Y., Kim, H. J., Kim, S. Y., Kim, B. I., 1997, 'Measurement of a Refractive Index and Thickness of Silicon-Dioxide Thin Film on LCD Glass Substrate Using a Variable Angle Ellipsometry,' Optical Society of Korea, Vol. 8, No. 1 과학기술학회마을 |
4 | Choi, D. J., 1987, 'The Measurement Thickness and Refracting Index of Ceramic Thin-Film by Ellipsometry,' Journal of the Korean Ceramic Society, Vol. 2, No. 4, pp. 392~395 |
5 | Bang, S. H., Hong, S. K., Kim, S. G., Kang, T. S., 2003, 'Controller Design of a Galvanometer for Laser Marking Equipment,' Journal of the Korean Institute of Illuminating and Electrical Installation Engineers, Vol. 17, No. 3 과학기술학회마을 DOI |
6 | Lee, W. Y., Kim, S. K., Cho, B. I. and Kwan, O. J., 1989, 'Evaluation of the Amorphous Layer Thickness in Implanted Silicon by Ellipsometry,' The Institute of Electronics Engineers of Korea, Vol. 12, No. 2 |
7 | Kwon, J. H. and Lee, S. H., 2003, 'Anti-reflection coatings for solar cells,' The Korean Solar Energy Society |
8 | Jung, S. T., Kim, K. S., Yang, S. p,. Jung, H. C. Y. and Lee, H., 2003, 'A Study on the Inner Defect Inspection for Semiconductor Package by ESPI,' The Korean Society of Mechanical Engineers, pp. 1442-1447 |
9 | Nam, S. J. and Han, K. S., 2001, 'Implementation of Automated Defect Detection and Classification System for Semiconductor Wafers,' Korean Institute of Information Scientists and Engineers, Vol. 28. No. 2 |
10 | Hofstetter, J., del Canizo, C., Ponce-Alcantara, S. and Luque A., 2007, Electron Devices, 'Optimization of SiNx:H Anti-Reflection Coatings for Silicon Solar Cells.' DOI |
11 | Kim, S. Y., 1990, 'Analysis of Surface and Thin Films Using Spectroscopic Ellipsometry,' Journal of the Optical Society of Korea, Vol. 1, No. 1 과학기술학회마을 |
12 | Lee, S. H. and Choi, K. S., 2006, 'An Implementation of Scanning Acoustic Microscope,' Korea Institute of Information Technology |
13 | Burgers, A.R., Kinderman, R., Hylton, J.D., Sinke, W.C. and De Moor, H.H.C., 1997, ECN Solar Energy 'Light-trapping in Saw-Damage Etched Silicon Wafers,' No. 5 |
14 | Moon, D. M., Kang, S. G., Ryoo, K. K. and Jeong, H. D., 1997, 'A Fundamental Study of the Bonded SOI Wafer Manufacturing,' Korean Society for Precision Engineering, pp. 921-926 |
15 | Chegal, W., Cho, Y. J., Cho, H. M., Kim, H. J., Lee, Y. W. and Kim, S. H., 2004, 'Measurement of Thin Film Thickness of Patterned Samples U sing Spectral Imaging Ellipsometry,' International Journal of Precision Engineering and Manufacturing, Vol. 21, No. 6 과학기술학회마을 |
16 | Tommi Suni, 'Direct Wafer Bonding for MEMS and Microelectronics,' Technical editing Leena Uksoski |