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http://dx.doi.org/10.3795/KSME-A.2008.32.9.713

Calculation of Effective Material Property for Multi-Grain Orthotropic Material by BEM  

Kim, Dong-Eun (경상대학교 대학원 기계공학과)
Lee, Sang-Hun (경상대학교 대학원 기계공학과)
Jeong, Il-Jung (경상대학교 대학원 기계공학과)
Lee, Seok-Soon (경상대학교 기계항공공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.32, no.9, 2008 , pp. 713-719 More about this Journal
Abstract
Most of the MEMS parts are made of multi-grain silicon wafer, which is the orthotropic material and its material direction is arbitrary. The reliability of the parts must be guaranteed in order to use for the commercial usage. The need of the structural analysis of its parts emerges an important factor. The material properties of the MEMS parts are calculated by the numerical method in order to reduce a material test. In this study, the effective elastic modulus and its Poisson's ratio are calculated by the boundary element method(BEM) and are compared with the results by the finite element method(FEM).
Keywords
Multi-Grain; Orthotropic; Effective Elastic Modulus; Effective Poisson's Ratio; Boundary Element Method;
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Times Cited By KSCI : 1  (Citation Analysis)
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