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http://dx.doi.org/10.3795/KSME-A.2007.31.12.1194

Fabrication of Copper Micromesh Sheets Using PDMS Flexible Mold  

Jung, Sun-Nyeong (부산대학교 기계공학부)
Kang, Chang-Kun (부산대학교 기계공학부)
Jung, Im-Deok (부산대학교 미세기계전자시스템)
Bae, Kong-Myeong (부산대학교 기계공학부)
Park, Chi-Yeol (부산대학교 기계공학부)
Jung, Phill-Gu (부산대학교 기계공학부)
Ko, Jong-Soo (부산대학교 기계공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.31, no.12, 2007 , pp. 1194-1199 More about this Journal
Abstract
A unique fabrication method for a copper micromesh is proposed and demonstrated. A PDMS mold was fabricated using a microcasting process and then used as a flexible mold in copper electroplating. The fabricated copper micromesh was well formed and connected without any cracks within the entire mold area. The experimental results verified that the fabricated features of the copper micromesh accurately followed the shape of the microstructures of the PDMS mold. This unique fabrication method provides an easy yet precise means of producing three-dimensional metal microstructures.
Keywords
Flexible Mold; PDMS; Electroforming; Polymer Replication; Micromesh; Microcasting;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
Times Cited By SCOPUS : 0
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