Browse > Article
http://dx.doi.org/10.3795/KSME-A.2006.30.9.1166

Alignment Method of Ion Beam Axis in Focused Ion Beam System  

Park, Cheol-Woo (한국산업기술대학교 기계공학과)
Lee, Jong-Hang (한국산업기술대학교 기계공학과)
Kang, Seung-Oun (광운대학교 전자물리학과)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.30, no.9, 2006 , pp. 1166-1172 More about this Journal
Abstract
This paper describes an alignment method of the ion column which is used for a focused-ion-beam machining system. The alignment parameters for mechanical and electrical components are introduced, and also sample images are used for evaluating the experiments. The experimental results show that geometrical positions of mechanical components have an influence on the quality of emitted ion beam. In addition, we can successfully align the traveling axis of ions by using mechanical and electrical methods.
Keywords
Focused Ion Beam; Ion Column; Condenser Lens; Objective Lens; Alignment; Performance Test;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Morita T., Arimoto H., Miyauchi E., and Hashimoto H., 1987, 'Alignment Accuracy of Focused Ion Beam Implantation,' Jpn. J. Appl. Phys., Vol. 26, No. 6, pp. 955-958   DOI
2 Orloff J., Utlaut M. and Swanson L., 2003, High Resolution Focused Ion Beams: FIB and its Applications, Kluwer Academic/Plenum Publisher, pp. 5-11
3 Prewett P. D. and Mair G. L. R., 1991, Focused Ion Beam from Liquid Metal Ion Sources, Research studies press Ltd., pp. 151-175
4 Matsui S., Kaito T., Fujita J., Komuro M., Kanda K. and Haruyama Y., 2000, 'Three-dimensional Nanostructure Fabrication by Focused-ion-beam Chemical Vapor Deposition,' J. Vac. Sci. Technol(B), Vol. 18, No. 6, pp. 3181-3184   DOI   ScienceOn