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http://dx.doi.org/10.3795/KSME-A.2005.29.11.1463

Agent-Based Scheduling for Semiconductor Wafer Fabrication Facilities  

Yoon, Hyun Joong (한국과학기술원 기계기술연구소)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.29, no.11, 2005 , pp. 1463-1471 More about this Journal
Abstract
This paper proposes an agent-based scheduling method fur semiconductor wafer fabrication facilities with hard inter-operation temporal constraints. The scheduling problem is to find the feasible schedules that guarantee both logical and temporal correctness. A proposed multi-agent based architecture is composed of scheduling agents, workcell agents, and machine agents. A scheduling agent computes optimal schedules through bidding mechanisms with a subset or entire set of the workcell agents. A dynamic planning-based approach is adopted for the scheduling mechanism so that the dynamic behaviors such as aperiodic job arrivals and reconfiguration can be taken into consideration.
Keywords
Scheduling; semiconductor wafer fabrication; agent system; hard temporal constraints;
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1 Lu, S. H., Ramaswamy, D. and Kumar, P. R., 1994, 'Efficient Scheduling Policies to Reduce Mean and Variance of Cycle-Time in Semiconductor Manufacturing Plants,' IEEE Transactions on Semiconductor Manufacturing, Vol. 7, No. 3, pp. 374-388   DOI   ScienceOn
2 Yoon, H. J. and Lee, D. Y., 2000, 'A Control Method to Reduce the Standard Deviation of Flow Time in Wafer Fabrication,' IEEE Transactions on Semiconductor Manufacturing, Vol. 13, No. 3, pp. 389-392   DOI   ScienceOn
3 Kemp, K, Intel Five-Machine Six Step Mini-Fab Description, Intel/ASU Report [on-line]
4 Schwalb, E. and Dechter, R., 1997, 'Processing Disjunction in Temporal Constraint Networks,' Artificial Intelligence, Vol. 93, pp. 29-61   DOI   ScienceOn
5 Dechter, R., Meiri, I. and Pearl, J., 1991, 'Temporal Constraint Network,' Artificial Intelligence, Vol. 49, pp. 61-95   DOI   ScienceOn
6 Cheng, F. T., Chang, C. F. and Wu, S. L., 2004, 'Development of Holonic Manufacturing Execution Systems,' Journal of Intelligent Manufacturing, Vol. 15, pp. 253-267   DOI
7 Shen, W., 2002, 'Distributed Manufacturing Scheduling Using Intelligent Agents,' IEEE Intelligent Systems, Vol. 17, No. 1, pp. 88-94   DOI
8 Yoon, H. J., 2004, 'Real-Time Scheduling of Semiconductor Integrated Single-Wafer Processing Tools,' Ph. D. Dissertation, Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
9 Yu, C. Y. and Huang, H. P., 2001, 'Development of the Order Fulfillment Process in the Foundry Fab by Applying Disributed Multi-Agents on a Generic Message-Passing Platform,' IEEE/ASME Transactions on Mechatronics, Vol. 6, No. 4, pp. 387-398   DOI   ScienceOn
10 Wyns, J., 1999, 'Reference Architecture for Holonic Manufacturing Systems: The Key to Support Evolution and Reconfiguration,' Ph. D. Dissertation, Department of Mechanical Engineering, Katholieke Universiteit Leuven, Belgium
11 Ramamritham, K. and Stankovic, J.A., 1994, 'Scheduling Algorithm and Operating Systems Support for Real-Time Systems,' Proceedings of the IEEE, Vol. 82, No. 1, pp. 55-67   DOI   ScienceOn
12 Hall, N. G. and Sriskandarajah, C, 1996, 'A Survey of Machine Scheduling Problems with Blocking and No-Wait in Process,' Operations Research, Vol. 44, No. 3, pp. 510-525   DOI   ScienceOn
13 Monch, L. and Stehli, M., 2003, 'An Ontology for Production Control of Semiconductor Manufacturing Processes,' in Proceedings of the First German Conference on Multiagent System Technologies, Erfurt, Germany
14 Chen, H., Chu, C. and Proth, J. M., 1998, 'Cyclic Scheduling of a Hoist with Time Window Constraints,' IEEE Transactions on Robotics and Automation, Vol. 14, No. 1, pp. 144-152   DOI   ScienceOn
15 Stankovic, J. A., Spuri, M., Ramamritham, K. and Buttazo, G. C., 1998, Deadline Scheduling for Real-Time Systems: EDF and Related Algorithms, Kluwer Academic Publishers, Norwell, MA
16 Monch, L., Stehli, M. and Zimmerman, J., 2003, 'FABMAS: An Agent-Based System for Production Control of Semiconductor Manufacturing Processes,' in Proceedings of the First International Conference on Industrial Application of Holonic and Multi-Agent Systems, Prague, Czech Republic
17 Kim, Y. D., Kim, J. G., Choi, B. and Kim, H. U., 2001, 'Production Scheduling in a Semiconductor Wafer Fabrication Facility Producing Multiple Product Types with Distinct Due Dates,' IEEE Transactions on Robotics and Automation, Vol. 17, No. 5, pp. 589-598   DOI   ScienceOn
18 Mason, S. J., Jin, S. and Wessels, C. M., 2004, 'Rescheduling Strategies for Minimizing Total Weighted Tardiness in Complex Job Shop,' International Journal of Production Research, Vol. 42, No. 3, pp. 613-628   DOI   ScienceOn
19 Watts, H., 2000, 'Improving Fab Performance,' Future Fab International, Vol. 9
20 Robinson, J. K., 1998, 'Capacity Planning in a Semiconductor Wafer Fabrication Facility with Time Constraints between Process Steps,' Ph. D. Dissertation, Department of Mechanical and Industrial Engineering, University of Massachusetts, Amherst
21 Kim, Y. D., Kim, J. U., Lim, S. K. and Jun, H. B., 1998, 'Due-Date Based Scheduling and Control Policies in a Multiproduct Semiconductor Wafer Fabrication Facility,' IEEE Transactions on Semiconductor Manufacturing, Vol. 11, No. 1, pp. 155-164   DOI   ScienceOn
22 Nissanke, N., 1997, Realtime System, Prentice Hall, London
23 LU S. H, P.R. Kumar, 'Distributed scheduling based on due dates and buffer priorities', IEEE Transactions on Automatic Control, 36, 1406-1416, 1991   DOI   ScienceOn