Chemo-Mechanical Polishing Process of Sapphire Wafers for GaN Semiconductor Thin Film Growth |
신귀수
(전북대학교 기계공학부)
황성원 (전북대학교 기계공학부) 서남섭 (전북대학교 기계공학부) 김근주 (전북대학교 기계공학부) |
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