Browse > Article
http://dx.doi.org/10.3795/KSME-A.2003.27.11.1941

Feasibility Study of Positioning Device Using Magnetic Suspension System of Out of Plane Direction Forces  

Lee, Sang-Heon (연세대학교 대학원 기계공학과)
Baek, Yoon-Su (연세대학교 기계공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.27, no.11, 2003 , pp. 1941-1948 More about this Journal
Abstract
This paper is about feasibility study of positioning device using magnetic suspension system which uses only vertical magnetic forces. The proposed system has inherited advantages from contact-free system, simple structure, and high expansibility in operating range different from conventional positioning devices. In this paper, the structure and operating principle are described and the linearized magnetic force and dynamic model are obtained. With the linear control theory, the experiments are executed. finally, the experimental results are shown.
Keywords
Positioning Device; Magnetic Suspension; Contact-Free System;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 Jung Kwang Suk and Baek Yoon Su, 2002, 'Study on a Novel Contact-Free Planar Moving System Using Electromagnet and Permanent magnet,' IEEE/ASME Trans. Mechatronics, Vol. 7, No. 1, pp.35-43   DOI   ScienceOn
2 Jung Kwang Suk, Lee Sang Heon, and Baek Yoon Su, 2002, 'Feasibility Study of General-purpose Precision Stage Using A Novel Contac-Free Surface Actuator Based on Magnetic Suspension Technology,' Trans. of KSME A, Vol. 26, No. 3, pp. 452-460   과학기술학회마을   DOI
3 Holmes M., Hocken P. and Trumper D., 2000, 'The Long-Range Scanning Stage: a Novel Platform for Scanned-Probe Microscopy,' Precision Engineering, Vol. 24, pp. 191-209   DOI   ScienceOn
4 Lee, S.H., and Baek Y.S., 2003, 'Modeling and Analysis of Electromagnets for Magnetic Suspension System,' Journal of the KSPE, Vol. 20, No. 5, pp. 180-188   과학기술학회마을
5 Kim, W.J., Trumper, D, and Jeffrey, H.L., 1998, 'Modeling and Vector Control of Planar Magnetic Levitator,' IEEE Trans. Industry Applications, Vol. 34, No. 6, pp. 1254-1262   DOI   ScienceOn
6 Bernard Etkin, 1972, Dynamics of Atmospheric Flight, John Wiley & Sons, Inc., pp. 121-195
7 Griffiths David J., 1989, Introduction to electrodynamics, Gyo hak sa, Seoul, pp. 227-250
8 JIn, J, Yih, T.C., Higuchi, T., and Jeon, J.P., 1998, 'Direct Electrostatic Levitation and Propulsion of Silicon Wafer,' IEEE Trans. Industry Applications, Vol. 34, No. 5, pp. 975-985   DOI   ScienceOn
9 Nasar, S.A., and Unnewehr L.E., 1983, Electromechanics and Electric Machines, John Wiley & Sons, Inc
10 Wang, I. A.,Li, S.H. and Vishniac, I.M., 1991, 'A Magnetic Levitation Transport Path,' IEEE Trans Semiconductor Manufacturing, Vol. 4, No. 2, pp. 145-154   DOI   ScienceOn
11 Sawyer, B.A., 1974, 'Actuating System,' U.S. Patent 3 857 078