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http://dx.doi.org/10.5572/KOSAE.2017.33.4.326

A Study on Particulate Matter Formed from Plasma Decomposition of SF6  

Kim, Seon-Woo (Department of Urban Environmental Engineering, Kyungnam University)
Kim, Jong-Bum (Department of Urban Environmental Engineering, Kyungnam University)
Kim, Jae-Hwan (Department of Urban Environmental Engineering, Kyungnam University)
Kim, Rae-Hyeong (Department of Urban Environmental Engineering, Kyungnam University)
Ryu, Jae-Yong (Department of Urban Environmental Engineering, Kyungnam University)
Publication Information
Journal of Korean Society for Atmospheric Environment / v.33, no.4, 2017 , pp. 326-332 More about this Journal
Abstract
$SF_6$ (sulfur hexafluoride) gas has an extremely high global warming potential (GWP). Therefore, there has been an effort to reduce of $SF_6$ its emission into atmosphere. In this study, $SF_6$ was injected into the plasma reactor directly, decomposed particulate matter of $SF_6$ was analyzed. Destruction and removal efficiency (DRE) of $SF_6$ were tested with varying degrees of plasma power and initial concentrations of $SF_6$ (1,000 ppm). This study is conducted with plasma power which are 4.4 kW, 5.5 kW, 6.0 kW, 6.6 kW, 7.6 kW, 8.1 kW and 9.1 kW. It was confirmed through experiment that the decomposition efficiency of $SF_6$ is 100% at 7.6 kW of the plasma power. In addition, the particulate matter is formed as minute particles of which size is $1{\mu}m$ and the main component of particulate matter is identified as $AlF_3$.
Keywords
$SF_6$ decomposition; Thermal plasma; Particulate; Global warming;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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1 Park, D.-W. and H.-S. Seon (2009) Thermal Plasma Process for Decomposing PFCs, Journal of Environmental and Thermal Engineers, 6, 89-98.
2 Jeon, S.-C., D.-Y. Kong, D.-S. Pyo, H.-Y. Choi, C.S. Cho, B.-H. Kim, and J.-H. Lee (2012) A Study on Etching of $Si_3N_4$ Thin Film and the Exhausted Gas Using $C_3F_6$ Gas for LCD Process, Journal of the Korean Vacuum Society, 21, 199-204.   DOI
3 John, F.-M., F.-S. William, E.-S. Peter, and D.-B. Kenneth (1992) A Reference Book of Standard Spectra for Identification and Interpretation of XPS Data, Physical Electronics Inc., U.S.A., 261.
4 Kim, D.-Y. and D.-W. Park (2008) Decomposition of PFCs by steam plasma at atmospheric pressure, The 6th Asian-European International Conference in Plasma Surface Engineering (AEPSE 2007), 306.
5 Ryu, J.-Y., J.-B. Kim, C.-Y. Choi, and S.-J. Lee (2012) A Study on Destruction Potential of Sulfur Hexafluoride ($SF_6$) Using High Ionization Energy, Journal of Korean Society for Atmospheric Environment, 28(4), 446-453.   DOI
6 Ryu, J.-Y., Y.-I. Son, and S.-H. Jang (2015) A Study on Decomposition and By-products of PFCs using Electron-beam, Journal of Korea Society of Waste Management, 32(1), 1-6.   DOI
7 Tasai, W.-T. (2007) The decomposition products of sulfur hexa-fluoride ($SF_6$), Reviews of environmental and health risk analysis, Journal of Fluorine Chemistry, 128, 1345-1352.   DOI
8 Xu, X., L. Sun, and Y. Wang (2011) $NF_3$ decomposition over $Al_2O_3$ reagents with water, Journal of Natural Gas Chemistry, 20, 418-422.   DOI
9 Yoo, H.-J., J.-S. Kim, J.-S. Lee, D.-M. Moon, J.-B. Lee, J.-H. Kim, S.-H. Kim, and I.-Y. Lee (2011) Measurement and characterization of atmospheric $SF_6$ at Korea GAW center in 2007, Journal of Korean Society for Atmospheric Environment, 27(1), 1-15.   DOI
10 Kim, J.-B., J.-Y. Ryu, C.-Y. Choi, S.-H. Jang, and Y.-I. Son (2013) A Study on Destruction Efficiency and Particulate by-products of Sulfur Hexafluoride ($SF_6$) using High Ionization Energy with Oxygen, Water Vapor and Hydrogen, Journal of of Korea Society of Waste Management, 30(8), 870-878.   DOI
11 Lee, C.-Y. and K.-J. Jeon (2012) A study on catalytic Process in Pilot Plant for Abatement of PFC Emission, Journal of Clean Technology, 18(2), 216-220.   DOI
12 Lee, D.-G. (2011) Basic Study for Improvement of GHG Emission Statistics, Statistical Research Institute Occasional Task Research Report, 12, 18.
13 Lee, S.-H., N.-K. Park, S.-H. Yoon, W.-C. Chang, and T.-J. Lee (2009) Catalytic decomposition of $SF_6$ by hydrolysis and oxidation over ${\gamma}$-$Al_2O_3$, Journal of Clean Technology, 15(4), 273-279.
14 Nam, S.-E., A. Park, and Y.-I. Park (2013) Separation and Recovery of F-gases, Journal of Membrane, 23(3), 189-203.
15 No, I.-J., P.-K. Shin, D.-W. Park, H.-K. Kim, S.-H. Lee, J.-K. Park, D.-H. Kang, and J.S. Kim (2008) Gliding arc plasma application for PFCs gas decomposition, The Transactions of The Korean Institute of Electrical Engineers, 7, 16-18.
16 IPCC (2007) Climate Change 2007: Synthesis Report. Contribution of Working Group I, II and III to the Fourth Assessment Report of the Itergovernmental panel Panel on Climate Change [Core Writing Team, Pachauri, R.K and Reisinger, A. (eds.)]. IPCC, Geneva Swizerland, 104.