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http://dx.doi.org/10.5572/KOSAE.2010.26.6.624

Development of a Plasma Waterjet Scrubber for the Reduction of PFCs  

Lee, Chae-Hong (Department Environmental Engineering.BK21 Team for Hydrogen Production, Chosun University)
Chun, Young-Nam (Department Environmental Engineering.BK21 Team for Hydrogen Production, Chosun University)
Publication Information
Journal of Korean Society for Atmospheric Environment / v.26, no.6, 2010 , pp. 624-632 More about this Journal
Abstract
Perfluorocarbons (PFCs) are widely used in semiconductor industry. These gases need to be removed efficiently because of their strong absorption of infrared radiation and long atmospheric lifetimes which cause the global warming effect. To destruct $CF_4$, a waterjet gliding arc plasma was designed and manufactured. The highest $CF_4$ destruction showed at waterjet plasma case, compared to plasma discharge only or water scrubber only, respectively. In addition, it could be known that the $CF_4$ destruction should be associated with the electron and OH radicals. The operating conditions such as waterjet flow rate, initial $CF_4$ concentration, total gas flow rate, specific energy input were investigated experimentally using a plasma waterjet scrubber. Through the parametric studies, the highest $CF_4$ destruction of 94.5% was achieved at 0.2% $CF_4$, 2.1 kJ/L SEI, 20 L/min total gas flow rate and 18.5 mL/min waterjet flow rate.
Keywords
Tetrafluoromethane; Waterjet; Gliding arc plasma; Energy efficiency; OH radical;
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Times Cited By KSCI : 2  (Citation Analysis)
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