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http://dx.doi.org/10.5572/KOSAE.2010.26.1.085

CF4 Treatment Characteristics using an Elongated Arc Reactor  

Kim, Kwan-Tae (Eco-machinery Research Division, Korea Institute of Machinery & Materials)
Lee, Dae-Hoon (Eco-machinery Research Division, Korea Institute of Machinery & Materials)
Lee, Jae-Ok (Eco-machinery Research Division, Korea Institute of Machinery & Materials)
Cha, Min-Suk (Eco-machinery Research Division, Korea Institute of Machinery &Materials)
Song, Young-Hoon (Eco-machinery Research Division, Korea Institute of Machinery & Materials)
Publication Information
Journal of Korean Society for Atmospheric Environment / v.26, no.1, 2010 , pp. 85-93 More about this Journal
Abstract
$CF_4$ removal characteristics were investigated using an elongated arc reactor. The advantage of the elongated arc reactor includes direct use of treated gas as plasma operating gas and the enhancement of the removal reaction by using a thermo-chemistry and a plasma induced chemistry at the same time. Geometrical configurations, such as the length of the reactor and the shape of a throat, were tested to get an optimized removal efficiency with low power consumption. As results, over 95% of $CF_4$ removal was obtained with 300 lpm of total flowrate for various $CF_4$ concentration (0.1~1%). Corresponding specific energy density (SED), which means required electrical energy to treat the unit volume of treated gas, is about 3.5 kJ/L, The present technique can be applied to real applications by satisfying three major concerns, those are the high flowrate of treated gas, high removal efficiency (> 95%), and low power consumption (< 10 kJ/L).
Keywords
PFCs(Perfluorocompounds); Tetrafluoromethane($CF_4$); Elongated arc; Abatement;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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1 Park, D.-W. and H.-S. Seon (2009) Thermal plasma process for decomposing PFCs, J. of Environmental & Thermal Eng., 6(1), 89-98. (in Korean with English abstract)
2 Watanabe, T. and T. Tsuru (2008) Water plasma generation under atmosphere pressure for HFC destruction, Thin Solid Films, 516, 4391-4396.   DOI   ScienceOn
3 Chang, M.B. and J.-S. Chang (2006) Abatement of PFCs from semiconductor manufacturing process by nonthermal plasma technologies, A critical review, Ind. Eng. Chem. Res., 45, 4101-4109.   DOI   ScienceOn
4 Fridman, A., S. Nester, L.A. Kennedy, A. Saveliev, and O. Mutaf-Yardimci (1999) Gliding arc gas discharge, Progress in Energy and Combustion Science, 25, 211-231.   DOI   ScienceOn
5 Glocker, B., G. Nentwig, and E. Messerschmid (2000) 1-40 kW steam respectively multi gas thermal plasma torch system, Vacuum, 59, 35-46.   DOI   ScienceOn
6 International SEMATECH Technology Transfer (1998) Current status of technology: Perfluorocompound (PFC) Emissions reduction, #98053508A-TR.
7 International SEMATECH Technology Transfer (1999) Long- Term Evaluation of the Litmas "Blue" Plasma Device for Point-of-Use (POU) Perfluorocompound and Hydro fluorocarbon Abatement, #99123865BENG.
8 Kim, D. and D.W. Park (2008) Decomposition of PFCs by steam plasma at atmospheric pressure, Surf. & Coat. Tech. 202, 5280-5283.   DOI   ScienceOn
9 Kim, K.-T., Y.-H. Kim, M.S. Cha, Y.-H. Song, S.-J. Kim, and J.-I. Ryu (2004) Decomposition characteristics of PFCs for various discharge methods in dielectric barrier discharge, Korean J. of Atmos. Environ., 20(5), 625-632. (in Korean with English abstract)
10 Kim, K.-T., Y.-H. Song, M.S. Cha, D.H. Lee, and D.-H. Kim (2008) Characteristics of rotating arc for $CF_{4}$ removal, Int. J. Environment and Waste Management, 2, 412-422.   DOI
11 Nishikawa, H., M. Ibe, M. Tanaka, M. Ushio, T. Takemoto, K. Tanaka, N. Tanahashi, and T. Ito (2004) A treatment of carnonaceous wastes using thermal plasma with steam, Vacuum, 73, 589-593.   DOI   ScienceOn