Browse > Article
http://dx.doi.org/10.9708/jksci.2012.17.2.167

Design and Implementation of a Hybrid Equipment Data Acquisition System(HEDAS) for Equipment Engineering System(EES) Framework  

Kim, Gyoung-Bae (Dept. of Computer Education, Seowon University)
Publication Information
Journal of the Korea Society of Computer and Information / v.17, no.2, 2012 , pp. 167-176 More about this Journal
Abstract
In this paper we design and implement a new Hybrid Equipment Data Acquisition System (HEDAS) for data collection of semiconductor and optoelectronic manufacturing equipments in the equipment engineering system(EES) framework. The amount of the data collected from equipments have increased rapidly in equipment engineering system. The proposed HEDAS efficiently handles a large amount of real-time equipment data generated from EES framework. It also can support the real-time ESS applications as well as non real-time ESS applications. For the real-time EES applications, it performs high-speed real-time processing that uses continuous query and filtering techniques based on memory buffers. The HEDAS can optionally store non real-time equipment data using a HEDAS-based database or a traditional DBMS-based database. In particular, The proposed HEDAS offers the compression indexing based on the timestamp of data and query processing technique saving the cost of disks storage against extremely increasing equipment data. The HEDAS is efficient system to collect huge real-time and non real-time equipment data and transmit the collected equipment data to several EES applications in EES framework.
Keywords
Equipment Engineering System; Equipment Data Acquisitions System; e-Manufacturing Execution System;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 R. Sandell and K. Srinivasan, "Evaluation of lot release policies for semiconductor manufacturing system," Proceedings of the 1996 winter simulation conference, pp.1014-1022.1996.
2 F. T. Cheng, E. Shen, J. Y. Deng and K. Nguyen, "Development of a system framework for the computer-integrated manufacturing execution system: a distributed object-oriented approach," International Journal of Computer Integrated Manufacturing, 12 (5) (1999) 384-402.   DOI
3 Seung Woo Lee and Hwa Ki Lee, "Data acquisition system of compound semiconductor fabrication," Journal of Mechanical Science and Technology 21, pp.2149-2158, 2007.   과학기술학회마을   DOI   ScienceOn
4 D. Carney, U. Cetinternel, M. Cherniack, C. Convey, S. Lee, G. Seidman, M. Stonebraker, N. Tatbul, S. Zdonik. "Monitoring Streams: New Class of Data Management Applications," In Proc. Int. Conf. on Very Large Data Bases, pp. 215-226, 2002.
5 J. Chen, D. DeWitt, F. Tian, Y. Wang. "NiagaraCQ: A Scalable Continuous Query System for Internet Databases," In Proc. ACM Int. Conf. on Management of Data, pp.379-390, 2000.
6 R. Motwani, J. Widom, A. Arasu, B. Babcock, S. Babu, M. Datar, G. Manku, C. Olston, J. Rosenstein, R. Varma. "Query Processing, Approximation, and Resource Management in a Data Stream Management System," In Proc. Conf. on Innovative Data Syst. Res, pp. 245-256, 2003.
7 Sang Ki Kim, Sung Ha Baek, Dong Wook Lee, Warn Il Chung, Gyoung Bae Kim, Hae Young Bae, "Data Source Management using weight table in u-GIS DSMS," Journal of Korea Spatial Information System Society, Vol. 11, No.2, pp.27-33, 2009.   과학기술학회마을
8 Kalappa, N., Moyn e, J., Parrott, J. and Li, Y. "Practical Aspects Impacting Time Synchronization Data Quality in Semiconductor Manufacturing," Proceedings of AEC/APC Symposium, October 2006.
9 Parker, J., Reath, M., Krauss, A.F., Campbell, W.J. "Monitoring and Preventing Arc-Induced Wafer Damage in 300mm Manufacturing," 2004 International Conference on Integrated Circuit Design and Technology, p.131-134, 2004.
10 Yasutsugu Usami, Isao Kawata, Hideyuki Yamamoto, Hiroyoshi Mori, and Motoya Taniguchi, "e-Manufacturing System for Next-generation Semiconductor Production," HITACHI Review Vol.51, No., pp.84-89, 2002.
11 http://www.mysql.com
12 Ya-Shian Li-Baboud, Xiao Zhu, Dhananjay Anand, Sulaiman Hussaini, and James Moyne, "Semiconductor Manufacturing Equipment Data Acquisition Simulation for Timing Performance Analysis," ISPCS 2008, pp.77-82,2008.
13 Altibase, EES solution for Semiconductor product ivity management using Hybrid DBMS, http://www.altibase.com.
14 http://www.oracle.com
15 http://www.ibm.com/db2
16 Motwani, R. et al., "Query Processing, Approximation, and Resource Management in a Data Stream Management System," In Proc. the First Biennial Conf. on Innovative Data Systems Research, Asiloma, California, pp. 245-256, Jan. 2003.
17 Long Wen, "Development of MES based on component and driven by ontology," International Seminar on Future Information Technology and Management Engineering 2008, pp.648-651, 2008.
18 T. J. Chua, M. W. Liu, F. Y. Wang, W. J. Yan and T. X. Cai, "An intelligent multi-constraint finite capacity-based lot release system for semiconductor backend assembly environment," Robotics and Computer-Integrated Manufacturing. 23 (3), pp. 326-338, 2007.   DOI   ScienceOn
19 Rockwell Automation, "Industry White Paper - Making Sense of e-Manufacturing: A Roadmap for Manufacturers," 2000. http://www.rockwellautomation.com/
20 International SEMATECH, Equipment Engineering Capabilities (EEC) Guidelines, Version 2.5, 2002.
21 ISMI, International SEMATECH Manufacturing Initiative. http://www.sematech.org/
22 SEMI, Semiconductor Equipment and Material International. http://www.semi.org/
23 Bistel, EES Framework.pdf, http://www.bistel-inc.com
24 Yu-Chuan Su, "Embedded System Framework Design for Data Collection and Analysis in the Semiconductor and Optoelectronic Industries," ICIEA 2009, pp.76-81, 2009.