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http://dx.doi.org/10.9714/sac.2012.14.4.005

Progress in the co-evaporation technologies developed for high performance REBa2Cu3O7-δ films and coated conductors  

Lee, J.W. (Department of Materials Science and Engineering, Research Institute of Advanced Materials (RIAM), Seoul National University)
Yoo, S.I. (Department of Materials Science and Engineering, Research Institute of Advanced Materials (RIAM), Seoul National University)
Publication Information
Progress in Superconductivity and Cryogenics / v.14, no.4, 2012 , pp. 5-11 More about this Journal
Abstract
In this review article, we focus on various co-evaporation technologies developed for the fabrication of high performance $REBa_2Cu_3O_{7-{\delta}}$ (RE: Y and Rare earth elements, REBCO) superconducting films. Compared with other manufacturing technologies for REBCO films such as sputtering, pulsed laser deposition (PLD), metal-organic deposition (MOD), and metal organic chemical vapor deposition (MOCVD), the co-evaporation method has a strong advantage of higher deposition rate because metal sources can be used as precursor materials. After the first attempt to produce REBCO films by the co-evaporation method in 1987, various co-evaporation technologies for high performance REBCO films have been developed during last several decades. The key points of each co-evaporation technology are reviewed in this article, which enables us to have a good insight into a new high throughput process, called as a Reactive Co-Evaporation by Deposition and Reaction (RCE-DR).
Keywords
Co-evaporation technology; REBCO film; coated conductor; in-situ growth; ex-situ growth;
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