Browse > Article
http://dx.doi.org/10.9714/psac.2007.9.1.018

Fabrication of IBAD-MgO template by continuous reel-to-reel process  

Ko, K.P. (서울대학교 재료공학부)
Ha, H.S. (한국전기연구원 초전도재료연구그룹)
Kim, H.K. (주식회사 서남)
Yu, K.K. (주식회사 서남)
Ko, R.K. (한국전기연구원 초전도재료연구그룹)
Moon, S.H. (주식회사 서남)
Oh, S.S. (한국전기연구원 초전도재료연구그룹)
Yoo, S.I. (서울대학교 재료공학부)
Publication Information
Progress in Superconductivity and Cryogenics / v.9, no.1, 2007 , pp. 18-21 More about this Journal
Abstract
Highly textured MgO template by ion-beam-assisted deposition(IBAD) was successfully fabricated using a continuous reel-to-reel(R2R) mode. To enlarge the deposition area, the previous IBAD system was modified into the system with 14-pass and five heating zone. Every processing step was carried out using this multi-turn IBAD system. The overall process consists of R2R electropolishing of a hastelloy C276 tape, deposition of $Al_2O_3$ diffusion barrier, $Y_2O_3$ seed layer, IBAD-MgO and homoepi-MgO layer. The IBAD-MgO templates were fabricated using the IBAD system with 216 cm-length deposition zone and 32 cm diameter ion source. The texture of MgO films developed during the IBAD process was monitored by in-situ reflection high energy electron diffraction(RHEED) to optimize the IBAD process. Recently, 100 m long IBAD-MgO tape with in-plane texture of $\Delta{\phi}<10^{\circ}$ was successfully fabricated using the modified IBAD system. In this report, the detailed deposition condition of getting a long length IBAD-MgO template with a good epitaxy is described.
Keywords
IBAD; reel-to-reel; multi-turn; electropoli-shing; ion source; RHEED;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Sascha Kreiskott et al., "Reel-to-reel preparation of ion-beam assisted deposition (IBAD)-MgO based coated conductors," Supercond. Sci. Technol. 17, pp. 132, 2004   DOI   ScienceOn
2 Y. Iijima, N. Tanabe, O. Kohno, and Y. Ikeno, "In-plane aligned $YBa_2Cu_3O_7_{-x}$ thin films deposited on polycrystalline metallic substrates," Appl. Phys. Lett. 60, pp. 769 1992   DOI
3 L. S. Yu, J. M. E. Harper, J. J. Cuomo, and D. A. Smith, "Alignment of thin films by glancing angle ion bombardment during deposition," Appl. Phys. Lett. 47, pp. 932 1985   DOI
4 C. P. Wang et al., "Deposition of in-plane textured MgO on amorphous $Si_3$ $N_4$substrates by ion-beam-assisted deposition and comparisons withion-beam-assisted-deposited yttria-stabilized-zirconia," Appl. Phys. Lett. 71, pp. 2955 1997   DOI   ScienceOn
5 X. D. Wu et al., "High current $YBa_2Cu_3O_7_{-\delta}$ thick films on flexible nickel substrates with textured buffer layers," Appl. Phys. Lett. 65, pp. 1961, 1994   DOI   ScienceOn
6 P. N. Arendt et al., "YBCO/YSZ COATED CONDUCTORS ON FLEXIBLE Ni ALLOY SUBSTRATES," Applied Superconductivity, 4, pp. 429, 1996   DOI   ScienceOn
7 R. M. Bradley, J. M. E. Harper, and D. A. Smith, "Theory of thin-film orientation by ion bombardment during deposition," J. Appl. Phys. 60, pp. 4160, 1986   DOI